Methods and systems for detecting defects in a reticle design pattern

• US 7,769,225 B2
• Filed: 12/20/2005
• Issued: 08/03/2010
• Est. Priority Date: 08/02/2005
• Status: Active Grant

• Current Assignee: Sadra Medical, Inc. (Boston Scientific Corporation), Kla-Tencor Technologies Corporation (KLA Corporation)
• Original Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Inventors: Kekare, Sagar A., Peterson, Ingrid B., Preil, Moshe E.
• Primary Examiner(s): Bali; Vikkram
• Assistant Examiner(s): ENTEZARI, MICHELLE M
• Application Number:
  US11/314,813
• Publication Number:
  US 20070035728A1
• Time in Patent Office: 1,687 Days
• Field of Search: 382/141
• US Class Current: 382/145
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G03F 1/84 Inspecting

Abstract

Computer-implemented methods and systems for detecting defects in a reticle design pattern are provided. One computer-implemented method includes acquiring images of a field in the reticle design pattern. The images illustrate how the field will be printed on a wafer at different values of one or more parameters of a wafer printing process. The field includes a first die and a second die. The method also includes detecting defects in the field based on a comparison of two or more of the images corresponding to two or more of the different values. In addition, the method includes determining if individual defects located in the first die have substantially the same within die position as individual defects located in the second die.

Claims

1. A computer-implemented method for detecting defects in a reticle design pattern, comprising:

acquiring images of a field in the reticle design pattern, wherein the images illustrate how the field will be printed on a wafer at different values of one or more parameters of a wafer printing process, and wherein the field comprises a first die and a second die;

detecting defects in the field by comparing two or more of the images to each other, wherein the two or more of the images that are compared to each other correspond to two or more of the different values;

determining if individual defects located in the first die have substantially the same within die position as individual defects located in the second die; and

assigning a composite priority to the individual defects based on results of said determining in combination with the different values of the one or more parameters of the wafer printing process corresponding to the images of the field in which the individual effects in the first and second die were detected.

2. The method of claim 1, wherein said assigning comprises assigning a higher priority to the individual defects that are located in the first and second die at substantially the same within die position than the individual defects that are not located in the first and second die at substantially the same within die position.

3. The method of claim 1, wherein the substantially the same within die position comprises a range of within die positions defined by a single within die position and a predetermined tolerance for acceptable positional variance.

4. The method of claim 1, wherein said determining comprises determining if the individual defects in the first die having substantially the same within die position as the individual defects located in the second die have one or more different characteristics and determining if the individual defects in the first or second die are random defects obscuring a defect in the reticle design pattern.

5. The method of claim 1, further comprising determining if the individual defects that are located in the first and second die at substantially the same within die position have a characteristic that is substantially the same.

6. The method of claim 5, wherein the characteristic qualifies as being substantially the same if a value of the characteristic is within a range of values for the characteristic, and wherein the range is defined by a single value for the characteristic and a predetermined tolerance for acceptable characteristic variance.

7. The method of claim 1, wherein said assigning comprises assigning a higher priority to the individual defects that are located in the first and second die at substantially the same within die position and have one or more characteristics that are substantially the same than a priority assigned to the individual defects that are located in the first and second die at substantially the same within die position and exhibit differences in the one or more characteristics.

8. The method of claim 1, further comprising selecting the first and second die within the field based on locations of the first and second die within the field.

9. The method of claim 1, wherein the field comprises die for different devices, the method further comprising selecting the first and second die within the field based on the different devices associated with the die.

10. The method of claim 1, wherein a sensitivity of said determining in a first region of the first and second die is different than a sensitivity of said determining in a second region of the first and second die.

11. The method of claim 1, further comprising filtering the individual defects based on results of said determining.

12. The method of claim 1, wherein the images of the field comprise images of the reticle design pattern printed on a wafer using the wafer printing process.

13. The method of claim 1, wherein the images of the field comprise aerial images of the reticle design pattern printed on a reticle.

14. The method of claim 1, wherein the images of the field comprise simulated images.

15. A system configured to detect defects in a reticle design pattern, comprising:

an optical subsystem configured to acquire images of a field in the reticle design pattern, wherein the images illustrate how the field will be printed on a wafer at different values of one or more parameters of a wafer printing process, and wherein the field comprises a first die and a second die; and

a processor coupled to the optical subsystem, wherein the processor is configured to;

detect defects in the field by comparing two or more of the images to each other, wherein the two or more of the images that are compared to each other correspond to two or more of the different values;

determine if individual defects located in the first die have substantially the same within die position as individual defects located in the second die; and

assign a composite priority to the individual defects based on results of determining if the individual defects located in the first die have substantially the same within die position as the individual defects located in the second die in combination with the different values of the one or more parameters of the wafer printing process corresponding to the images of the field in which the individual defects in the first and second die were detected.

16. The system of claim 15, wherein the optical subsystem is further configured to acquire the images by imaging a wafer on which the reticle design pattern is printed using the wafer printing process.

17. The system of claim 15, wherein the optical subsystem is further configured as an aerial imaging measurement system.

18. The system of claim 17, wherein the aerial imaging measurement system comprises sensors coupled to a substrate and positioned at different heights with respect to a reticle on which the reticle design pattern is formed, and wherein the sensors are configured to acquire the images.

19. A system configured to detect defects in a reticle design pattern, comprising:

a simulation engine configured to generate simulated images of a field in the reticle design pattern, wherein the simulated images illustrate how the field will be printed on a wafer at different values of one or more parameters of a wafer printing process, and wherein the field comprises a first die and a second die; and

a processor coupled to the simulation engine, wherein the processor is configured to;

detect defects in the field by comparing two or more of the simulated images to each other, wherein the two or more of the simulated images that are compared to each other correspond to two or more of the different values;

determine if individual defects located in the first die have substantially the same within die position as individual defects located in the second die; and

assign a composite priority to the individual defects based on results of determining if the individual defects located in the first die have substantially the same within die position as the individual defects located in the second die in combination with the different values of the one or more parameters of the wafer printing process corresponding to the images of the field in which the individual defects in the first and second die were detected.