Barrier regions for image sensors
First Claim
1. A method of forming a barrier region for isolating devices of an image sensor comprising a pixel array having an active array region comprising at least one active pixel cell, and a black region comprising at least one pixel cell not in the active array region, the method comprising:
- forming a group of barrier pixel cells in the array having a common charge accumulation region of a particular conductivity type in a substrate adjacent to the at least one active pixel cell, wherein the group of barrier pixel cells is formed surrounding the at least one black region and between the black region and the active array region; and
electrically connecting the charge accumulation region to a voltage source terminal.
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Abstract
Embodiments of the invention provide a barrier region for isolating devices of an image sensor. The barrier region comprises a charge accumulation region of a particular conductivity type in a substrate electrically connected to a voltage source terminal. The charge accumulation region is adjacent to at least one pixel cell of a pixel array. The charge accumulation region accumulates charge and prevents charge transference from a pixel cell or peripheral circuitry on one side of the barrier region to a pixel cell on another side of the barrier region.
41 Citations
20 Claims
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1. A method of forming a barrier region for isolating devices of an image sensor comprising a pixel array having an active array region comprising at least one active pixel cell, and a black region comprising at least one pixel cell not in the active array region, the method comprising:
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forming a group of barrier pixel cells in the array having a common charge accumulation region of a particular conductivity type in a substrate adjacent to the at least one active pixel cell, wherein the group of barrier pixel cells is formed surrounding the at least one black region and between the black region and the active array region; and electrically connecting the charge accumulation region to a voltage source terminal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of forming an image sensor, the method comprising:
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providing a substrate; providing an array of pixel cells on the substrate comprising an active array region comprising a first portion of pixel cells, and at least one black region comprising a second portion of pixel cells not in the active array region; and forming at least one barrier region adjacent to at least one pixel cell by forming a charge accumulation region of a particular conductivity type on the substrate and electrically connecting the charge accumulation region to a voltage source terminal, the act of forming the at least one barrier region further comprising forming the at least one barrier region surrounding the at least one black region and between the black region and the active array region. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A method of forming an image sensor, the method comprising:
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providing an array of pixel cells on a substrate comprising an active array region comprising a first portion of pixel cells, and at least one black region comprising a second portion of pixel cells not in the active array region; providing peripheral circuitry adjacent to the array; and forming a plurality of barrier regions by forming a plurality of n-type charge accumulation regions on the substrate and electrically connecting each of the charge accumulation regions to a positive voltage source terminal, each barrier region being formed adjacent to at least one pixel cell, the act of forming the plurality of barrier regions further comprising forming at least one barrier region surrounding the black region and between the black region and the peripheral circuitry. - View Dependent Claims (18, 19, 20)
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Specification