Periodic dimple array
First Claim
1. A microelectromechanical (MEMS) device comprising:
- a substrate;
an actuation electrode over the substrate;
a reflective layer over the actuation electrode, the reflective layer including a plurality of apertures through the reflective layer and inwardly spaced from a lateral edge of the reflective layer; and
a support layer between the actuation electrode and the reflective layer, the support layer including a recess below each of the plurality of apertures and between the actuation electrode and the plurality of apertures, wherein the recesses are in a pattern that is periodic in two dimensions along the support layer, wherein upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the each of the recesses and at least a second portion of the reflective layer is configured to remain stationary, the first portion of the reflective layer comprising the plurality of apertures, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.
3 Assignments
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Accused Products
Abstract
A microelectromechanical (MEMS) device includes a substrate, an actuation electrode over the substrate, a reflective layer over the actuation electrode, and a support layer between the actuation electrode and the reflective layer. The reflective layer includes at least one aperture through the reflective layer. The support layer includes a recess between the actuation electrode and the at least one aperture. Upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary. The reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.
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Citations
37 Claims
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1. A microelectromechanical (MEMS) device comprising:
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a substrate; an actuation electrode over the substrate; a reflective layer over the actuation electrode, the reflective layer including a plurality of apertures through the reflective layer and inwardly spaced from a lateral edge of the reflective layer; and a support layer between the actuation electrode and the reflective layer, the support layer including a recess below each of the plurality of apertures and between the actuation electrode and the plurality of apertures, wherein the recesses are in a pattern that is periodic in two dimensions along the support layer, wherein upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the each of the recesses and at least a second portion of the reflective layer is configured to remain stationary, the first portion of the reflective layer comprising the plurality of apertures, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A microelectromechanical (MEMS) device comprising:
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an actuation electrode; a reflective layer over the actuation electrode, the reflective layer including at least one aperture through the reflective layer, wherein the at least one aperture has a generally circular cross-section through a plane parallel to the reflective layer; and a support layer between the actuation electrode and the reflective layer, the support layer including a recess under the at least one aperture, wherein upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary, the first portion comprising the at least one aperture, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion. - View Dependent Claims (34, 35)
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36. A microelectromechanical (MEMS) device comprising:
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an actuation electrode; a reflective layer over the actuation electrode, the reflective layer including at least one generally circular aperture through the reflective layer; and a support layer between the actuation electrode and the reflective layer, the support layer including a generally circular recess positioned under the at least one aperture, a diameter of the at least one aperture is smaller than a diameter of the recess, wherein upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion. - View Dependent Claims (37)
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Specification