Dielectric material
First Claim
Patent Images
1. A dielectric material, comprising:
- a metal containing cation including one or more oxides, sub-oxides and sub-oxy-hydroxides; and
a polyatomic anion including one or more of sulfate (SO42−
), borate (BO33−
), and phosphate (PO43−
);
wherein said dielectric material is amorphous;
and wherein said dielectric material comprises a film in an electronic component, said electronic component including one or more of a field effect transistor and a capacitor.
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Abstract
One embodiment of a dielectric material may include a metal containing cation and a polyatomic anion.
40 Citations
36 Claims
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1. A dielectric material, comprising:
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a metal containing cation including one or more oxides, sub-oxides and sub-oxy-hydroxides; and a polyatomic anion including one or more of sulfate (SO42−
), borate (BO33−
), and phosphate (PO43−
);wherein said dielectric material is amorphous; and wherein said dielectric material comprises a film in an electronic component, said electronic component including one or more of a field effect transistor and a capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A process of forming a dielectric film, comprising:
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providing a metal containing cation that includes one or more of hafnium suboxide (HfO2+), zirconium suboxide (ZrO2+), titanium suboxide (TiO2+), tantalum suboxide (TaO3+), yttrium suboxide (YO+), niobium suboxide (NbO3+), molybdenum suboxide (MoO4+), tungsten suboxide (WO4+), aluminum suboxide (AlO+), gallium suboxide (GaO+), and suboxides of the lanthanide series; providng a polyatomic anion including one or more of sulfate (SO42−
), borate (BO33−
), and phosphate (PO43−
);reacting said polyatomic anion and said metal containing cation to form a precursor solution; and printing said precursor solution on a substrate through an inkjet printhead to form an amorphous dielectric film. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A process of depositing a dielectric film, comprising:
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providing a metal containing cation that includes one or more of hafnium suboxide (HfO2+), zirconium suboxide (ZrO2+),titanium suboxide (TiO2+),tantalum suboxide (TaO3+), yttrium suboxide (YO+), niobium suboxide (NbO3+), molybdenum suboxide (MoO4+), tungsten suboxide (WO4+), aluminum suboxide (AlO+), gallium suboxide (GaO+), and suboxides of the lanthanide series; providing a polyatomic anion including one or more of sulfate (SO42−
), borate (BO33−
), and phosphate (PO43−
);reacting said polyatomic anion with said metal containing cation to form a precursor solution; and applying said precursor solution on a substrate by an application chosen from the group including spin-coating, dip-coating, spray-coating, and inkjet printing to form a non-crystalline dielectric film. - View Dependent Claims (21, 22, 23, 24)
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25. A method of depositing a dielectric film, comprising:
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reacting a polyatomic anion with a metal containing cation to form a liquid solution; and printing said liquid solution on a substrate through a nozzle to form an amorphous dielectric film; wherein said metal containing cation includes one or more of hafnium suboxide (HfO2+), zirconium suboxide (ZrO2+),titanium suboxide (TiO2+),tantalum suboxide (TaO3+), yttrium suboxide (YO+), niobium suboxide (NbO3+), molybdenum suboxide (MoO4+), tungsten suboxide (WO4+), aluminum suboxide (AlO+), gallium suboxide (GaO+), and suboxides of the lanthanide series and wherein said polyatomic anion includes one or more of sulfate (SO42−
), borate (BO33−
), and phosphate (PO43−
).
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26. An electronic device including a dielectric film, wherein said dielectric film is manufactured from components comprising:
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a metal containing cation that includes one or more of hafnium suboxide (HfO2+), zirconium suboxide (ZrO2+),titanium suboxide (TiO2+),tantalum suboxide (TaO3+), yttrium suboxide (YO+), niobium suboxide (NbO3+), molybdenum suboxide (MoO4+), tungsten suboxide (WO4+), aluminum suboxide (AlO+), gallium suboxide (GaO+), and suboxides of the lanthanide series; and a polyatomic anion including one or more of sulfate (SO42−
), borate (BO33−
), and phosphate (PO43−
);wherein said dielectric film is non-crystalline. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification