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Fluid flow monitor

  • US 7,775,126 B2
  • Filed: 10/22/2008
  • Issued: 08/17/2010
  • Est. Priority Date: 10/22/2008
  • Status: Active Grant
First Claim
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1. A method for monitoring fluid flow through a fluid line having an orifice along the length of the fluid line, comprising:

  • providing a package that includes a plurality of piezoresistive sense die in close proximity to one another, wherein a first one of said plurality of piezoresistive sense die is situated adjacent to a first flow diaphragm situated on a first side of the orifice, and a second one of said plurality of piezoresistive sense die is situated adjacent to a second flow diaphragm positioned on a second side of the orifice;

    transferring a force from said first flow diaphragm to said first piezoresistive sense die through a first plunger, and transferring a force from said second flow diaphragm to said second piezoresistive sense die through a second plunger; and

    performing a signal compensation utilizing at least one electronic device associated with said plurality of piezoresistive sense die to thereby provide a thermal calibration and a differential calculation, wherein said at least one electronic device communicates electronically with external electronics to automatically monitor fluid flow through the fluid line.

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