Filter window manufacturing method

• US 7,776,390 B2
• Filed: 07/30/2007
• Issued: 08/17/2010
• Est. Priority Date: 07/25/2003
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Bakker, Levinus Pieter, Kurt, Ralph
• Primary Examiner(s): Cleveland; Michael
• Assistant Examiner(s): Penny; Tabatha
• Application Number:
  US11/878,989
• Publication Number:
  US 20080254211A1
• Time in Patent Office: 1,114 Days
• Field of Search: 427/164, 427/226, 216/24
• US Class Current: 427/164
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 1/24 Reflection masks; Preparation thereof
• CPC Class Codes: G03F 1/62 Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
• CPC Class Codes: G21K 1/10 Scattering devices; Absorbing devices; Ionising radiation filters

Abstract

A filter window manufacturing method includes fabricating a structure of wires on a substrate, depositing a lacquer over the wires and the substrate, depositing a first layer that includes a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof, removing the lacquer, removing the substrate, and baking the first layer.

Claims

1. A filter window manufacturing method, comprising:

fabricating a structure of wires on a substrate;

depositing a lacquer over the wires and the substrate;

depositing a first layer over the lacquer, the first layer comprising a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof;

removing said lacquer;

removing said substrate, and

baking said first layer.

2. A filter window manufacturing method as in claim 1, wherein said removing said lacquer comprises heating to vaporize said lacquer.

3. A filter window manufacturing method according to claim 1, further comprising:

fabricating a second layer comprising a material selected from the group consisting of Si, Be, B₄C, Mo, Zr, Nb, C, Al and combinations thereof; and

depositing a third layer comprising a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof.

4. A filter window manufacturing method comprising:

depositing, onto a substrate soluble in a fluid, a first layer comprising a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof;

dissolving said substrate in the fluid;

removing said first layer from the fluid by adhering said first layer to a wire structure; and

baking said first layer.

5. A filter window manufacturing method according to claim 4, further comprising:

fabricating a second layer comprising a material selected from the group consisting of Si, Be, B₄C, Mo, Zr, Nb, C, Al and combinations thereof; and

depositing a third layer comprising a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof.

6. A filter window manufacturing method according to claim 5, wherein said fabricating said second layer comprises fabricating a base layer and elevated bars on top of said base layer.