Methods for characterizing dielectric properties of parts
First Claim
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1. A method for characterizing dielectric properties of a part, comprising:
- placing a full-size part having its normal geometric configuration within a dielectric property measurement apparatus, wherein the dielectric property measurement apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, and an electrically grounded upper electrode disposed within the chamber above the lower electrode, wherein the full-size part is placed on the lower electrode;
positioning the electrically grounded upper electrode to rest freely on top of the full-size part such that a contact force between the electrically grounded upper electrode and the full-size part is defined only by a weight of the electrically grounded upper electrode;
operating the dielectric property measurement apparatus to determine a dielectric constant value of the full-size part and a loss tangent value of the full-sized part; and
attaching the determined dielectric constant and loss tangent values to the full-size part.
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Abstract
Characterizing dielectric properties of a part includes placing a full-sized part within a dielectric property measurement apparatus. In one embodiment, the full-sized part is a dielectric part of a plasma processing system. The dielectric property measurement apparatus is operated to determine a dielectric constant value of the full-sized part and a loss tangent value of the full-sized part. The determined dielectric constant and loss tangent values are affixed to the full-sized part.
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10 Claims
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1. A method for characterizing dielectric properties of a part, comprising:
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placing a full-size part having its normal geometric configuration within a dielectric property measurement apparatus, wherein the dielectric property measurement apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, and an electrically grounded upper electrode disposed within the chamber above the lower electrode, wherein the full-size part is placed on the lower electrode; positioning the electrically grounded upper electrode to rest freely on top of the full-size part such that a contact force between the electrically grounded upper electrode and the full-size part is defined only by a weight of the electrically grounded upper electrode; operating the dielectric property measurement apparatus to determine a dielectric constant value of the full-size part and a loss tangent value of the full-sized part; and attaching the determined dielectric constant and loss tangent values to the full-size part. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for characterizing dielectric properties of a dielectric part of a plasma processing system, comprising:
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placing a full-size version of the dielectric part having its normal geometric configuration within a dielectric property measurement apparatus, wherein the dielectric property measurement apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, and an electrically grounded upper electrode disposed within the chamber above the lower electrode, wherein the full-size version of the dielectric part is placed on the lower electrode; positioning the electrically grounded upper electrode to rest freely on top of the full-size version of the dielectric part such that a contact force between the electrically grounded upper electrode and the full-size version of the dielectric part is defined only by a weight of the electrically grounded upper electrode; operating the dielectric property measurement apparatus to determine a capacitance value of the dielectric part, a resistance value of the dielectric part, a dielectric constant value of the dielectric part, and a loss tangent value of the dielectric part; and embossing on the dielectric part each of the dielectric constant and loss tangent values of the dielectric part. - View Dependent Claims (9, 10)
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Specification