×

Laser system

  • US 7,778,302 B2
  • Filed: 10/30/2007
  • Issued: 08/17/2010
  • Est. Priority Date: 11/01/2005
  • Status: Active Grant
First Claim
Patent Images

1. An apparatus comprising:

  • a pulsed excimer or molecular fluorine gas discharge laser system comprising;

    a seed laser oscillator producing an output comprising a laser output light beam of pulses comprising;

    a first gas discharge excimer or molecular fluorine laser chamber;

    a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, comprising;

    a ring power amplification stage; and

    a coherence busting mechanism intermediate the seed laser oscillator and the ring power amplification stage comprising a beam splitter separating the seed laser output into a main beam and a beam entering an optical delay path having a delay length longer than the coherence length of a pulse in the seed laser output;

    wherein the coherence busting mechanism comprises a coherence busting optical structure generating multiple sub-pulses delayed sequentially from a single input pulse, wherein each sub-pulse is delayed from the following sub-pulse by more than the coherence length of the pulse light.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×