Ink jet nozzle assembly having layered ejection actuator
First Claim
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1. An ink jet nozzle assembly comprising:
- a wafer substrate defining an ink supply passage;
a drive circuitry layer formed on the wafer substrate;
an ink chamber structure on the drive circuitry layer, the ink chamber structure defining an ink chamber in fluid communication with the ink supply passage and an ink ejection port;
an ejection member disposed between the ink supply passage and the ink ejection port; and
a layered actuator having a first layer electrically coupled to the drive circuitry layer and the ejection member so that the drive circuitry layer can electrically actuate the actuator to move the ejection member and thereby eject ink from the ink ejection port.
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Abstract
An ink jet nozzle assembly is provided having a wafer substrate defining an ink supply passage, a drive circuitry layer formed on the wafer substrate, an ink chamber structure on the drive circuitry layer, the ink chamber structure defining an ink chamber in fluid communication with the ink supply passage and an ink ejection port, and a layered actuator having a first layer electrically coupled to the drive circuitry layer so that the drive circuitry layer can electrically actuate the actuator to thereby eject ink from the ink ejection port.
52 Citations
4 Claims
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1. An ink jet nozzle assembly comprising:
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a wafer substrate defining an ink supply passage; a drive circuitry layer formed on the wafer substrate; an ink chamber structure on the drive circuitry layer, the ink chamber structure defining an ink chamber in fluid communication with the ink supply passage and an ink ejection port; an ejection member disposed between the ink supply passage and the ink ejection port; and a layered actuator having a first layer electrically coupled to the drive circuitry layer and the ejection member so that the drive circuitry layer can electrically actuate the actuator to move the ejection member and thereby eject ink from the ink ejection port. - View Dependent Claims (2, 3, 4)
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Specification