MEMS process and device

• US 7,781,249 B2
• Filed: 03/20/2007
• Issued: 08/24/2010
• Est. Priority Date: 03/20/2006
• Status: Active Grant

• Current Assignee: Cirrus Logic Incorporated
• Original Assignee: Wolfson Microelectronics plc
• Inventors: Laming, Richard I., Traynor, Anthony, Begbie, Mark
• Primary Examiner(s): Toledo; Fernando L
• Application Number:
  US11/723,514
• Publication Number:
  US 20070284682A1
• Time in Patent Office: 1,253 Days
• Field of Search: 438/51, 438/53, 257/E21.214, 257/E21.499, 257/E29.324, 977/733
• US Class Current: 438/51
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81C 1/00158 Diaphragms, membranes manufacture process for semi-permeable inorganic membranes B01D67/0039
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: B81C 99/004 during manufacturing
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 2307/207 Shape aspects of the outer suspension of loudspeaker diaphragms
• CPC Class Codes: H04R 7/10 comprising superposed layers in contact
• CPC Class Codes: H04R 7/18 at the periphery
• CPC Class Codes: Y10S 977/733 Nanodiaphragm

Abstract

A MEMS device comprising a flexible membrane that is free to move in response to pressure differences generated by sound waves. A first electrode mechanically coupled to the flexible membrane, and together form a first capacitive plate. A second electrode mechanically coupled to a generally rigid structural layer or back-plate, which together form a second capacitive plate. A back-volume is provided below the membrane. A first cavity located directly below the membrane. Interposed between the first and second electrodes is a second cavity. A plurality of bleed holes connect the first cavity and the second cavity. Acoustic holes are arranged in the back-plate so as to allow free movement of air molecules, such that the sound waves can enter the second cavity. The first and second cavities in association with the back-volume allow the membrane to move in response to the sound waves entering via the acoustic holes in the back-plate.

Claims

1. A method of fabricating a micro-electrical-mechanical system (MEMS) microphone on a substrate, the method comprising:

depositing first and second electrodes;

depositing a membrane, the membrane being mechanically coupled to the first electrode; and

depositing a back plate, the back plate being mechanically coupled to the second electrode;

wherein the step of depositing the membrane further comprises the step of depositing the membrane on a first sacrificial layer; and

wherein the method further comprises the steps of;

depositing a second sacrificial layer in an area between the first and second electrodes; and

removing the first and second sacrificial layers so as to form a MEMS microphone having a first cavity beneath the membrane, and a second cavity between the first and second electrodes, such that the membrane and the first electrode are able to move relative to the second electrode.

2. A method as claimed in claim 1 further comprising the step of forming a third cavity, the third cavity connecting with the first cavity to form a back volume.

3. A method as claimed in claim 1, further comprising the step of forming the first sacrificial layer on at least one structural layer, the at least one structural layer being positioned between the membrane and the substrate.

4. A method as claimed in claim 3, wherein the step of forming the third cavity comprises the step of etching the substrate and the at least one structural layer, and wherein the first sacrificial layer acts as an etch stop for the third cavity.

5. A method as claimed in claim 3, wherein the third cavity is formed such that the area of the third cavity at a plane where the third cavity meets the first sacrificial layer is smaller than the area of the first sacrificial layer, such that the area of the third cavity in said plane falls substantially within the perimeter of the first sacrificial layer.

6. A method as claimed in claims 2, wherein the third cavity is formed using a dry etch process.

7. A method as claimed in claim 2, wherein the third cavity is formed using a wet etch process.

8. A method as claimed in any one of claim 1, further comprising the step of forming a plurality of openings through the membrane material between the first sacrificial layer and the second sacrificial layer.

9. A method as claimed in claim 8, wherein the step of forming the plurality of openings comprises the steps of:

etching a plurality of holes in the material of the membrane; and

depositing the second sacrificial layer over the membrane and the holes etched in the material of the membrane, such that the second sacrificial layer fills the holes etched in the material of the membrane.

10. A method as claimed in claim 8, wherein said openings are positioned in an outer area of the first sacrificial layer, the outer area of the first sacrificial layer being outside the area defined by the third cavity at the plane where the third cavity meets the first sacrificial layer.

11. A method as claimed in any one of claim 8, wherein the plurality of openings are arranged such that an area etched through a first opening substantially overlaps an area etched through an adjacent opening.

12. A method as claimed in claim 11, wherein the openings having a spacing of less than 100 um.

13. A method as claimed in claim 10, wherein said openings are formed on one or more concentric circles in the outer area of the first sacrificial layer.

17. A method as claimed in claim 1, wherein the step of removing the first and second sacrificial layers comprises the steps of:

removing the first sacrificial layer; and

subsequently removing the second sacrificial layer.

18. A method as claimed in claim 17 wherein the first and second sacrificial layers are removed by etching in a first direction, the first direction being from the substrate side towards the first sacrificial layer.

19. A method as claimed in any one of claim 1, wherein the step of removing the first and second sacrificial layers comprises the steps of:

removing the second sacrificial layer; and

subsequently removing the first sacrificial layer.

20. A method as claimed in claim 19 wherein the first and second sacrificial layers are removed by etching in a second direction, the second direction being from the back plate side towards the second sacrificial layer.

21. A method as claimed in any one of claim 1, comprising forming a plurality of MEMS microphones on a wafer.

22. A method as claimed in claim 21 further comprising the steps of:

placing the wafer on a carrier between the step of removing the inner portion of the first sacrificial layer and the step of removing the second sacrificial layer and the outer area of the first sacrificial layer; and

singulating the wafer prior to the step of removing the second sacrificial layer and the outer area of the first sacrificial layer.

23. A method as claimed in claim 21, further comprising the steps of:

placing the wafer on a carrier prior to the step of removing the inner portion of the first sacrificial layer; and

singulating the wafer prior to the step of removing the second sacrificial layer and the outer area of the first sacrificial layer.

24. A method as claimed in claim 23, further comprising the step of perforating the carrier prior to the step of removing the inner portion of the first sacrificial layer.

25. A method as claimed in claim 23, wherein the carrier is configured to allow the inner portion of the first sacrificial layer to be etched via the back volume while located on the carrier.

26. A method as claimed in claim 25, wherein the carrier comprises one or more channels or trenches or protrusions for allowing the inner portion of the first sacrificial layer to be etched via the back volume while located on the carrier.

27. A method as claimed in claim 23, wherein the substrate is configured to allow the inner portion of the first sacrificial layer to be etched via the back volume while located on the carrier.

28. A method as claimed in claim 27, wherein the substrate comprises one or more channels or trenches or protrusions for allowing the inner portion of the first sacrificial layer to be etched via the back volume while located on the carrier.

29. A method as claimed in claim 22, wherein the step of singulating comprises cutting the substrate using a saw.

30. A method as claimed in claim 22, wherein the step of singulating comprises scribing and cleaving the substrate.

31. A method as claimed in claim 22, wherein the step of singulating comprises cutting the substrate using a laser.

32. A method as claimed in claim 22, wherein the carrier is a dicing tape.

33. A method as claimed in claim 32, wherein the dicing tape is able to sustain temperatures that are higher than the temperature of the process for removing the sacrificial layers.

34. A method as claimed in claim 25, wherein the carrier is made from glass or silicon wafer.

37. A method as claimed in claim 1, wherein at least one of the sacrificial layers comprises an organic material.

38. A method as claimed in claim 37, wherein at least one of the sacrificial layers is a polyacrylate, a polyimide, a polyamide, a polycarbonate, or a polyethylene terapthalate.

39. A method as claimed in claim 1, wherein the steps of removing the first and/or second sacrificial layers comprises using a dry etch process.

40. A method as claimed in claim 39, wherein the step of removing the first and/or second sacrificial layers comprises using a plasma oxygen etch process.

41. A method as claimed in claim 40, wherein the plasma oxygen is mixed with one or more of the following gases:

SF6, CF4, CH2F2, H2, Ar, C4F8, C2F6, CFH3.

14. A method as claimed in 1, wherein the step of removing the first and second sacrificial layers comprises:

removing an inner area of the first sacrificial layer;

removing the second sacrificial layer; and

removing an outer area of the first sacrificial layer.

15. A method as claimed in claim 14, wherein the step of removing the second sacrificial layer and the step of removing the outer area of the first sacrificial layer are performed separately.

16. A method as claimed in claim 14 comprising:

removing the inner area of the first sacrificial layer by etching in a first direction, the first direction being from the substrate side towards the first sacrificial layer; and

removing the second sacrificial layer and the outer area of the first sacrificial layer by etching in a second direction, the second direction being from the back plate side towards the second sacrificial layer.

35. A method as claimed in 1, further comprising the step of forming a plurality of openings in the back plate.

36. A method as claimed in claim 35, further comprising the step of depositing a protective layer on the back plate.

42. A method of fabricating a micro-electrical-mechanical system (MEMS) microphone, the method comprising the steps of:

depositing first and second electrodes;

depositing a membrane that it is mechanically coupled to the first electrode; and

depositing a back plate that it is mechanically coupled to the second electrode;

wherein the step of depositing the second electrode comprises the step of forming a predetermined pattern in the second electrode, and wherein the predetermined pattern comprises one or more openings.

43. A method as claimed in claim 42, wherein the one or more openings correspond to one or more openings formed in the back plate.

44. A method as claimed in claim 43, further comprising the step of forming at least one of the openings in the second electrode to be larger than a corresponding opening in the back plate.

45. A method of testing a plurality of micro-electrical-mechanical system (MEMS) microphones formed on a wafer, each MEMS microphone comprising a membrane and at least one sacrificial layer, the method comprising the steps of:

attaching the wafer to a carrier;

singulating the wafer to form two or more MEMS microphones;

removing the at least one sacrificial layer; and

testing the MEMS microphones while attached to the carrier.

46. A method as claimed in claim 45, wherein the carrier comprises a dicing tape.