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Method for measuring volume by an optical surface profilometer in a micromechanical device and a system for carrying out said measurement

  • US 7,782,467 B2
  • Filed: 01/24/2006
  • Issued: 08/24/2010
  • Est. Priority Date: 01/25/2005
  • Status: Expired due to Fees
First Claim
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1. A method of measuring a volume in a fluid flow micromechanical device by optically measuring the profile of a surface therein, said micromechanical device comprising a stack covered by a transparent closure plate, said stack comprising a support plate and a silicon wafer covering said support plate and itself covered by the closure plate, at least one cavity being formed between said closure plate and said silicon wafer, a moving member formed in the silicon wafer being suitable for moving towards and away from the support plate respectively between first and second positions that define a variation in the volume of said cavity, the method comprising:

  • a) providing and positioning an optical profile measuring apparatus for measuring a profile of a surface in such a manner that a face of the moving member facing towards the closure plate is a reference face for the measurement;

    b) providing image acquisition and processor means enabling images coming from the optical profile measuring apparatus to be acquired and processed;

    c) placing said moving member in said first position and activating said optical profile measuring apparatus for measuring the profile of the surface to direct a light beam on said reference face; and

    activating the image acquisition and processor means to obtain a first image of said reference face in said first position of the moving member;

    d) placing said moving member in said second position and activating said optical profile measuring apparatus for measuring the profile of the surface to direct a light beam on said reference face; and

    activating the image acquisition and processor means to obtain a second image of said reference face in said second position of the moving member; and

    e) comparing said second image with said first image of said reference face to determine the variation in the volume of the cavity caused by the deformation of the moving member.

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