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Projection objective having a high aperture and a planar end surface

  • US 7,782,538 B2
  • Filed: 11/12/2008
  • Issued: 08/24/2010
  • Est. Priority Date: 12/15/2003
  • Status: Expired due to Fees
First Claim
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1. A projection objective comprising:

  • a plurality of optical elements transparent to radiation at an operating wavelength of the projection objective and including a lens starting from which a convergent beam path begins to converge and remains convergent up to an image plane, andan aperture diaphragm arranged at a distance of at least 10 mm from the lens and on the image side of the lens,wherein the operating wavelength is a deep ultraviolet wavelength λ



    193 nm, andwherein at least one of the optical elements has a refractive index n≧

    1.6 at the operating wavelength.

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