Method and system for determining dimensions of a structure having a re-entrant profile
First Claim
Patent Images
1. A method for generating dimensions of a structure having a re-entrant profile, comprising:
- imaging at least a portion of a top surface of said structure to determine a top critical dimension, TCD, of said structure at a hardware imager of a hardware imaging system;
imaging a second portion of said structure from a first plurality of imaging perspectives to generate a left sidewall dimension, LW, and an angle, α
, associated with a left re-entrant angle, 90°
+α
, of said structure at said hardware imager of said hardware imaging system;
imaging a third portion of said structure from a second plurality of imaging perspectives to generate a right sidewall dimension, RW, and an angle, β
, associated with a right re-entrant angle, 90°
+β
, of said structure at said hardware imager of said hardware imaging system; and
generating a bottom critical dimension, BCD, of said structure based on generating said top critical dimension, TCD, said left sidewall dimension, LW, said angle, α
, said right sidewall dimension, RW, and said angle, β
at a hardware dimension determiner of a hardware dimension determining system.
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Abstract
Methods and systems for determining dimensions of a structure that has a re-entrant profile are disclosed. A method includes imaging at least a portion of a top surface of the structure. Subsequently, a second portion of the structure is imaged from a plurality of perspectives. A third portion of the structure is also imaged from a plurality of perspectives. A dimension of a bottom portion of the structure is determined based on the imaging.
12 Citations
32 Claims
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1. A method for generating dimensions of a structure having a re-entrant profile, comprising:
-
imaging at least a portion of a top surface of said structure to determine a top critical dimension, TCD, of said structure at a hardware imager of a hardware imaging system; imaging a second portion of said structure from a first plurality of imaging perspectives to generate a left sidewall dimension, LW, and an angle, α
, associated with a left re-entrant angle, 90°
+α
, of said structure at said hardware imager of said hardware imaging system;imaging a third portion of said structure from a second plurality of imaging perspectives to generate a right sidewall dimension, RW, and an angle, β
, associated with a right re-entrant angle, 90°
+β
, of said structure at said hardware imager of said hardware imaging system; andgenerating a bottom critical dimension, BCD, of said structure based on generating said top critical dimension, TCD, said left sidewall dimension, LW, said angle, α
, said right sidewall dimension, RW, and said angle, β
at a hardware dimension determiner of a hardware dimension determining system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer readable storage medium comprising instructions thereon, when executed cause a computer system to perform, in an imaging system, a method for generating a bottom dimension of a structure having a re-entrant profile, comprising:
-
generating image data related to a top dimension of said structure to determine a top critical dimension, TCD, of said structure; generating image data from a first plurality of imaging positions that are oriented in a first direction to determine a left sidewall dimension, LW, and an angle, α
, associated with a left re-entrant angle, 90°
+α
, of said structure;generating image data from a second plurality of imaging positions that are oriented in a second direction to determine a right sidewall dimension, RW, and an angle, β
, associated with a right re-entrant angle, 90°
+β
, of said structure; andgenerating a bottom critical dimension, BCD, of said structure based on determining said top critical dimension, TCD, said left sidewall dimension, LW, said angle, α
, said right sidewall dimension, RW, and said angle, β
. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A method for generating dimensions of a structure having a re-entrant profile, comprising:
-
generating a top critical dimension, TCD, of said structure at a hardware dimension determiner of a hardware dimension determining system; generating a left sidewall dimension, LW, and an angle, α
, associated with a left re-entrant angle, 90°
+α
, of said structure at said hardware dimension determiner of said hardware dimension determining system;generating a right sidewall dimension, RW, and an angle, β
, associated with a right re-entrant angle, 90°
+β
, of said structure at said hardware dimension determiner of said hardware dimension determining system; andgenerating a bottom critical dimension, BCD, of said structure based on generating said top critical dimension, TCD, said left sidewall dimension, LW, said angle, α
, said right sidewall dimension, RW, and said angle, β
at said hardware dimension determiner of said hardware dimension determining system. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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25. A system for determining dimensions of a structure having a re-entrant profile, comprising:
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an imager that images at least a portion of a top surface of said structure to determine a top critical dimension, TCD, of said structure, at least a second portion of said structure from a first plurality of imaging perspectives to determine a left sidewall dimension, LW, and an angle, α
, associated with a left re-entrant angle, 90°
+α
, of said structure and at least a third portion of said structure from a second plurality of imaging perspectives to determine a right sidewall dimension, RW, and an angle, β
, associated with a right re-entrant angle, 90°
+β
, of said structure; anda determiner that determines a bottom critical dimension, BCD, of said structure based on determining said top critical dimension, TCD, said left sidewall dimension, LW, said angle, α
, said right sidewall dimension, RW, and said angle, β
. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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Specification