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Method and system for determining dimensions of a structure having a re-entrant profile

  • US 7,783,101 B2
  • Filed: 12/15/2004
  • Issued: 08/24/2010
  • Est. Priority Date: 12/15/2004
  • Status: Expired due to Fees
First Claim
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1. A method for generating dimensions of a structure having a re-entrant profile, comprising:

  • imaging at least a portion of a top surface of said structure to determine a top critical dimension, TCD, of said structure at a hardware imager of a hardware imaging system;

    imaging a second portion of said structure from a first plurality of imaging perspectives to generate a left sidewall dimension, LW, and an angle, α

    , associated with a left re-entrant angle, 90°



    , of said structure at said hardware imager of said hardware imaging system;

    imaging a third portion of said structure from a second plurality of imaging perspectives to generate a right sidewall dimension, RW, and an angle, β

    , associated with a right re-entrant angle, 90°



    , of said structure at said hardware imager of said hardware imaging system; and

    generating a bottom critical dimension, BCD, of said structure based on generating said top critical dimension, TCD, said left sidewall dimension, LW, said angle, α

    , said right sidewall dimension, RW, and said angle, β

    at a hardware dimension determiner of a hardware dimension determining system.

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