Integrated MEMS 3D multi-sensor
First Claim
1. An apparatus comprising:
- a first capacitive bridge sensor having a first proof mass supported by a first set of springs to permit movement in a first axis and a first comb capacitive structure responsive to movement of the first proof mass and responsive to magnetic fields; and
a second capacitive bridge sensor having a second proof mass located within the first proof mass, the second proof mass supported by a second set of springs to permit movement in a second axis and a second comb capacitive structure responsive to movement of the first proof mass and responsive to magnetic fields, wherein the first and second comb structures are adapted to utilize differential sidewall capacitive sensing for both movement of the proof masses and magnetic fields.
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Abstract
Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. Sensing of the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.
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Citations
19 Claims
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1. An apparatus comprising:
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a first capacitive bridge sensor having a first proof mass supported by a first set of springs to permit movement in a first axis and a first comb capacitive structure responsive to movement of the first proof mass and responsive to magnetic fields; and a second capacitive bridge sensor having a second proof mass located within the first proof mass, the second proof mass supported by a second set of springs to permit movement in a second axis and a second comb capacitive structure responsive to movement of the first proof mass and responsive to magnetic fields, wherein the first and second comb structures are adapted to utilize differential sidewall capacitive sensing for both movement of the proof masses and magnetic fields. - View Dependent Claims (2, 3, 4, 5)
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6. An apparatus comprising,
an external capacitive bridge sensor having a first proof mass for sensing a first parameter in a first axis; -
an internal capacitive bridge sensor having a second proof mass suspended within the first proof mass for sensing the parameter in a second axis; and a further capacitive bridge sensor having a third proof mass for sensing the parameter in a third axis, wherein each bridge sensor includes comb capacitive structure responsive to movement of a respective proof mass and responsive to magnetic fields, wherein the comb structures are adapted to utilize differential sidewall capacitive sensing for both movement of the proof masses and magnetic fields. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method comprising:
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sensing acceleration in a first axis with a first proof mass; sensing acceleration in a second axis with a second proof mass, the second proof mass being located within the first proof mass; sensing acceleration in a third axis with a third proof mass; sensing a first magnetic field in the second axis with the first proof mass; sensing a second magnetic field in the first axis with the second proof mass, the second proof mass being located within the first proof mass; and sensing a third magnetic field in the third axis with a fourth proof mass. - View Dependent Claims (17, 18, 19)
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Specification