Apparatus for measuring pressure by using diaphragm and method of pressure measurement by using diaphragm
First Claim
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1. An apparatus for measuring pressure by using a diaphragm comprising:
- a diaphragm sensor including a sensor housing formed with a first opening and a second opening, a diaphragm mounted between the first opening and the second opening to spatially isolate the first opening and the second opening from each other and provided with a conducive part, an electrode substrate formed with a through hole to form a channel between the second opening and the diaphragm and mounted between the second opening and the diaphragm, and an electrode attached to the electrode substrate to face the diaphragm; and
a pressure variable container formed with a third opening and a fourth opening and on which the sensor housing is fixed to communicate the second opening with the third opening.
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Abstract
The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.
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Citations
5 Claims
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1. An apparatus for measuring pressure by using a diaphragm comprising:
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a diaphragm sensor including a sensor housing formed with a first opening and a second opening, a diaphragm mounted between the first opening and the second opening to spatially isolate the first opening and the second opening from each other and provided with a conducive part, an electrode substrate formed with a through hole to form a channel between the second opening and the diaphragm and mounted between the second opening and the diaphragm, and an electrode attached to the electrode substrate to face the diaphragm; and a pressure variable container formed with a third opening and a fourth opening and on which the sensor housing is fixed to communicate the second opening with the third opening. - View Dependent Claims (2, 3, 4, 5)
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Specification