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Apparatus for measuring pressure by using diaphragm and method of pressure measurement by using diaphragm

  • US 7,784,352 B2
  • Filed: 12/29/2008
  • Issued: 08/31/2010
  • Est. Priority Date: 04/18/2008
  • Status: Expired due to Fees
First Claim
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1. An apparatus for measuring pressure by using a diaphragm comprising:

  • a diaphragm sensor including a sensor housing formed with a first opening and a second opening, a diaphragm mounted between the first opening and the second opening to spatially isolate the first opening and the second opening from each other and provided with a conducive part, an electrode substrate formed with a through hole to form a channel between the second opening and the diaphragm and mounted between the second opening and the diaphragm, and an electrode attached to the electrode substrate to face the diaphragm; and

    a pressure variable container formed with a third opening and a fourth opening and on which the sensor housing is fixed to communicate the second opening with the third opening.

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