Formation of close-packed sphere arrays in V-shaped grooves
First Claim
1. A method comprising:
- providing a substrate having at least one V-shaped groove formed at least in part by two angled side walls; and
applying a self-assembling block copolymer in the at least one V-shaped groove, an angle of the walls for the at least one V-shaped groove and the block copolymer selected such that the block copolymer forms a face-centered cubic system (fcc) sphere array of close-packed spheres within the at least one V-shaped groove.
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Abstract
The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped grooves promote the formation of a face-centered cubic system (fcc) sphere array that is well ordered. In one embodiment, the (111) planes of the fcc sphere array are parallel to the angled side walls of the V-shaped groove. The (100) plane of the fcc sphere array is parallel to the top surface of the substrate, and may show a square symmetry among adjacent spheres. This square symmetry is unlike the hexagonal symmetry seen in monolayers of spherical domains and is a useful geometry for lithography applications, especially those used in semiconductor applications.
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Citations
21 Claims
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1. A method comprising:
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providing a substrate having at least one V-shaped groove formed at least in part by two angled side walls; and applying a self-assembling block copolymer in the at least one V-shaped groove, an angle of the walls for the at least one V-shaped groove and the block copolymer selected such that the block copolymer forms a face-centered cubic system (fcc) sphere array of close-packed spheres within the at least one V-shaped groove. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification