Apparatus and method for cleaning glass substrates using a cool hydrogen flame

• US 7,790,477 B2
• Filed: 02/06/2009
• Issued: 09/07/2010
• Est. Priority Date: 11/21/2001
• Status: Expired due to Fees

• Current Assignee: Agency For Science Technology and Research
• Original Assignee: Agency For Science Technology and Research
• Inventors: Lim, Tuti Mariana, Chen, Sau Ngen, Liang, David Tee
• Primary Examiner(s): Stark; Jarrett J
• Application Number:
  US12/366,660
• Publication Number:
  US 20090188534A1
• Time in Patent Office: 578 Days
• Field of Search: None
• US Class Current: 438/4
• CPC Class Codes: B08B 7/0071 by heating B08B7/0035 takes precedence
• CPC Class Codes: C03B 29/025 Glass sheets
• CPC Class Codes: C03C 23/0075 Cleaning of glass specially adapted to plate glass B08B11/00
• CPC Class Codes: H01L 21/02046 Dry cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/02054 combining dry and wet cleaning steps H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: Y10S 438/906 Cleaning of wafer as interim step

Abstract

Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.

Claims

1. A system for cleaning surfaces of a glass substrate for manufacturing Flat Panel Displays, said system comprising:

a jig for securely holding said glass substrate;

a conveying means for transporting said jig;

a washing unit using de-ionized water for cleaning said glass substrate;

a drying unit;

a cleaning chamber using hydrogen diffusion flame wherein the hydrogen diffusion flame is produced by burning hydrogen and oxygen at an interface formed by an envelope of oxygen surrounding the hydrogen, wherein;

the hydrogen and oxygen are not pre-mixed before being ignited; and

said hydrogen diffusion flame generates radicals to react with contaminants on said glass substrate for removing said contaminants; and

at least one nozzle for spraying fine mist of hydrogen peroxide towards said hydrogen diffusion flame.

2. The system according to claim 1, wherein said cleaning chamber is a vacuum chamber.

3. The system according to claim 1, wherein said system further comprises a clean room for passivating and packaging said glass substrate.

4. The system according to claim 1, wherein pressure within said cleaning chamber is about 0.2 bar.

5. The system according to claim 1, wherein said cleaning chamber comprises a plurality of burner nozzles producing a plurality of hydrogen diffusion flames.

6. The system according to claim 1, wherein said plurality of burner nozzles are capable of controlled movement in a predetermined fashion.

7. The system according to claim 1, wherein said plurality of burner nozzles are of the tube in orifice design.

8. The system according to claim 1, wherein the oxygen is at least 100% more than the hydrogen.

9. The system according to claim 1, wherein said cleaning chamber further comprises at least one nozzle introducing ozone gas towards said glass substrate.