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Method for fabricating a transducer package with the transducer die unsupported by a substrate

  • US 7,790,492 B1
  • Filed: 08/18/2009
  • Issued: 09/07/2010
  • Est. Priority Date: 06/13/2009
  • Status: Active Grant
First Claim
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1. A method of fabricating a transducer package, said method comprising the steps of:

  • applying a layer of an adhesive film to a production panel;

    bonding a sheet of terminal pad material to said layer of adhesive film;

    defining a plurality of terminal pad sets on said sheet of terminal pad material, wherein each of said terminal pad sets corresponds to one of a plurality of transducer packages;

    removing excess terminal pad material from said sheet of terminal pad material, wherein excess terminal pad material is defined as terminal pad material other than the terminal pad material comprising said plurality of terminal pad sets;

    attaching a signal processing integrated circuit (IC) to each of said plurality of transducer packages;

    bonding a MEMS transducer to said layer of adhesive film through a transducer window within each of said plurality of terminal pad sets;

    electrically connecting said MEMS transducer to said signal processing IC for each of said plurality of transducer packages;

    electrically connecting said signal processing IC to said terminal pad set for each of said plurality of transducer packages;

    positioning a production dam on said production panel, said production dam comprised of a plurality of encapsulation apertures, wherein each of said plurality of encapsulation apertures surround at least a portion of each of said terminal pad sets corresponding to said plurality of transducer packages;

    pouring encapsulation material into said plurality of encapsulation apertures;

    removing said production dam;

    attaching a cover to each of said plurality of transducer packages; and

    separating said plurality of transducer packages from said production panel and into a plurality of individual transducer packages.

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