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Strained tri-channel layer for semiconductor-based electronic devices

  • US 7,791,107 B2
  • Filed: 06/16/2004
  • Issued: 09/07/2010
  • Est. Priority Date: 06/16/2004
  • Status: Active Grant
First Claim
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1. A semiconductor-based structure, comprising:

  • a first tensilely strained layer consisting essentially of silicon;

    a second tensilely strained layer consisting essentially of silicon;

    a compressively strained layer forming a p-channel, and consisting essentially of silicon and germanium disposed between and in contact with the first and second tensilely strained layers, the first and second tensilely strained layers impeding diffusion of germanium out of the compressively strained layer;

    a substrate in contact with the first tensilely strained layer that induces tensile strain into the first tensilely strained layer;

    a gate disposed over the second tensilely strained layer to establish the p-channel;

    a source region at a first side of the p-channel; and

    a drain region at a second side of the p-channel.

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