Method for manufacturing semiconductor device

• US 7,791,153 B2
• Filed: 02/17/2009
• Issued: 09/07/2010
• Est. Priority Date: 06/30/2005
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Tsurume, Takuya, Kusumoto, Naoto
• Primary Examiner(s): Thai; Luan C
• Application Number:
  US12/371,937
• Publication Number:
  US 20090159998A1
• Time in Patent Office: 567 Days
• Field of Search: 257/428, 257/E27.122, 235/492, 340/572.8
• US Class Current: 257/428
• CPC Class Codes: G06K 19/07749 the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card

Abstract

It is an object of the present invention to provide a method for manufacturing a semiconductor device, which is flexible and superiority in physical strength. As a method for manufacturing a semiconductor device, an element layer including a plurality of integrated circuits is formed over one surface of a substrate; a hole having curvature is formed in part of one surface side of the substrate; the substrate is thinned (for example, the other surface of the substrate is ground and polished); and the substrate is cut off so that a cross section of the substrate has curvature corresponding to a portion where the hole is formed; whereby a laminated body including an integrated circuit is formed. Further, a thickness of the substrate, which is polished, is 2 μm or more and 50 μm or less.

Claims

1. A semiconductor device comprising:

a substrate;

a base film formed over a surface of the substrate;

an element layer formed over the base film; and

an insulating layer formed over the element layer;

wherein the element layer includes a plurality of thin film transistors and an antenna which is electrically connected to at least one of the plurality of thin film transistors,

wherein the antenna is arranged to receive an electromagnetic wave to generate a voltage which is used to operate the plurality of thin film transistors,

wherein each of side surfaces of the substrate, the base film, the element layer, and the insulating layer has a curved shape,

wherein a bottom surface of the base film, which is in contact with the surface of the substrate, has a larger area than a top surface of the base film,

wherein a bottom surface of the element layer, which is in contact with the top surface of the base film, has a larger area than a top surface of the element layer, and

wherein a bottom surface of the insulating layer, which is in contact with the top surface of the element layer, has a larger area than a top surface of the insulating layer.

2. The semiconductor device according to claim 1,

wherein the semiconductor device further comprises a first base and a second base, and

wherein the substrate, the base film, the element layer, and the insulating layer are interposed between the first base and the second base.

3. The semiconductor device according to claim 1,

wherein the side surface of the substrate is regulated by two centers and two curvature radiuses, and

wherein the two centers are different in position from each other and the two curvature radiuses are different in length from each other.

4. The semiconductor device according to claim 2,

wherein the first base and the second base comprise a material selected from polypropylene, polyester, poly(vinyl fluoride), polyamide, an acrylic-based resin, an epoxy-based resin, and a film whose surface is coated with an inorganic material.

5. The semiconductor device according to claim 2,

wherein the first base and the second base include an antistatic material.

6. A semiconductor device comprising:

a substrate;

a base film formed over a surface of the substrate;

an element layer formed over the base film; and

an insulating layer formed over the element layer;

wherein the element layer includes a plurality of integrated circuits and an antenna;

wherein the antenna is arranged to receive an electromagnetic wave to generate an alternating current voltage which is used to operate the plurality of integrated circuits,

wherein each of side surfaces of the substrate, the base film, the element layer, and the insulating layer has a curved shape,

wherein a bottom surface of the base film, which is in contact with the surface of the substrate, has a larger area than a top surface of the base film,

wherein a bottom surface of the element layer, which is in contact with the top surface of the base film, has a larger area than a top surface of the element layer, and

wherein a bottom surface of the insulating layer, which is in contact with the top surface of the element layer, has a larger area than a top surface of the insulating layer.

7. The semiconductor device according to claim 6,

wherein the semiconductor device further comprises a first base and a second base, and

wherein the substrate, the base film, the element layer, and the insulating layer are interposed between the first base and the second base.

8. The semiconductor device according to claim 6,

wherein the side surface of the substrate is regulated by two centers and two curvature radiuses, and

wherein the two centers are different in position from each other and the two curvature radiuses are different in length from each other.

9. The semiconductor device according to claim 7,

wherein the first base and the second base comprise a material selected from polypropylene, polyester, poly(vinyl fluoride), polyamide, an acrylic-based resin, an epoxy-based resin, and a film whose surface is coated with an inorganic material.

10. The semiconductor device according to claim 7,

wherein the first base and the second base include an antistatic material.

11. The semiconductor device according to claim 6,

wherein the plurality of integrated circuits include a power supply circuit, a clock generation circuit, a data modulation/demodulation circuit, a control circuit, an interface circuit, a data bus, and a memory.