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Planar inductor and method of manufacturing it

  • US 7,791,165 B2
  • Filed: 05/09/2005
  • Issued: 09/07/2010
  • Est. Priority Date: 05/13/2004
  • Status: Expired due to Fees
First Claim
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1. A planar inductor, comprising a metal element on a substrate, said metal element being provided with at least one groove extending along and into said element from at least one surface of said element, wherein said at least one groove extends into the element in a direction substantially perpendicular to the surface of the substrate,wherein the metal element comprises at least three superposed metal layers each extending in a direction parallel to the substrate, wherein at least one of said layers is not provided with said at least one groove, and wherein said at least one groove extends from a surface of said inductor and all through at least two of said layers until reaching the at least one layer not being provided with said at least one groove.

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