Image sensor packages and frame structure thereof

• US 7,791,184 B2
• Filed: 04/26/2006
• Issued: 09/07/2010
• Est. Priority Date: 08/16/2004
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Farnworth, Warren M., Kirby, Kyle K., Wood, Alan G., Akram, Salman
• Primary Examiner(s): Nguyen; Khiem D
• Application Number:
  US11/411,265
• Publication Number:
  US 20060192230A1
• Time in Patent Office: 1,595 Days
• Field of Search: 257/234, 257/433, 257/434, 257/680, 257/E33.058, 257/E33.059, 257/414, 257/431, 257/432, 257/E31.127, 257/E21.499, 257/E21.5, 257/E21.524, 257/678, 257/E33.076, 438/116, 438121-127, 438/27, 438/28, 438/29, 438/33, 438/113
• US Class Current: 257/680
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

A semiconductor package such as an image sensor package. A frame structure includes an array of frames, each having an aperture therethrough, into which an image sensor die in combination with a cover glass, filter, lens or other components may be installed in precise mutual alignment. Singulated image sensor dice and other components may be picked and placed into each frame of the frame structure. Alternatively, the frame structure may be configured to be aligned with and joined to a wafer bearing a plurality of image sensor dice, wherein optional, downwardly protruding skirts along peripheries of the frames may be received into kerfs cut along streets between die locations on the wafer, followed by installation of other package components. In either instance, the frame structure in combination with singulated image sensor dice or a joined wafer is singulated into individual image sensor packages. Various external connection approaches may be used.

Claims

1. An image sensor package, comprising:

a frame having upper and lower surfaces and substantially planar outer side surfaces;

an aperture extending from the upper surface to the lower surface and having a lower inverted step surrounding the aperture, an upper step extending entirely around a periphery of the aperture and at least another upper step extending entirely around the periphery of the aperture;

a semiconductor die having an active surface including an optically active region and bond pads disposed peripherally with respect thereto, a back side and lateral sides, the semiconductor die substantially disposed in the aperture with the active surface joined to the lower inverted step, the lateral sides substantially covered by a skirt portion of the frame; and

an optically transmissive window disposed in the aperture and secured to the upper step.

2. The image sensor package of claim 1, further comprising a plurality of conductors having inner ends exposed in the aperture and outer ends exposed on an outer surface of the frame, wherein the bond pads are operably coupled to the inner ends.

3. The image sensor package of claim 2, further comprising at least one external connection structure operably coupled to the outer ends of conductors of the plurality.

4. The image sensor package of claim 3, wherein the at least one external connection structure comprises at least one of conductive bumps, conductive pads and a flex circuit bearing conductive elements in contact with the outer ends of conductors of the plurality.

5. The image sensor package of claim 1, further comprising a dielectric encapsulant covering the back side of the semiconductor die.

6. The image sensor package of claim 1, further comprising a lens fixed in an uppermost portion of the aperture.

7. The image sensor package of claim 6, wherein the lens includes a Helimorph actuator for focusing.

8. The image sensor package of claim 6, wherein the lens comprises a microfluidic lens of two immiscible liquids in a hydrophobic tube configured to change focal length responsive to a voltage variation.

9. The image sensor package of claim 6, further comprising a circuit in the semiconductor die for enabling focusing of the lens.

10. The image sensor package of claim 1, wherein at least a portion of a surface of the semiconductor die is covered with a mask material comprising one of an oxide and a nitride.

11. The image sensor package of claim 1, further comprising an optical component secured to the at least another upper step.

12. The image sensor package of claim 11, wherein the optical component comprises one of a lens, a pre-lens and a filter.

13. The image sensor package of claim 1, wherein the frame is formed of at least one of a polymer, a semiconductor material, a ceramic, a metal and an alloy.

14. The image sensor package of claim 1, wherein the semiconductor die is completely received in the aperture and recessed therein.

15. The image sensor package of claim 14, further including a dielectric layer extending over the back side of the semiconductor die and having an outer surface substantially flush with the lower surface of the frame.

16. The image sensor package of claim 1, wherein the semiconductor die is substantially completely received in the aperture and the back side thereof is substantially flush with the lower surface of the frame.

17. The image sensor package of claim 16, further including a dielectric layer extending over the lower surface of the frame and the back side of the semiconductor die.

18. The image sensor package of claim 1, wherein a lower portion of the semiconductor die protrudes below the lower surface of the frame.

19. The image sensor package of claim 18, further including a dielectric layer substantially encapsulating the lower portion of the semiconductor die and contiguous with the lower surface of the frame.

20. The image sensor package of claim 1, wherein the semiconductor die includes a plurality of conductive vias extending from the active surface to the back side thereof, and further including at least one external connection structure operably coupled to conductive vias of the plurality.

21. The image sensor package of claim 20, wherein the at least one external connection structure includes at least one of conductive bumps, conductive lands and a dielectric film carrying conductive elements thereon.

22. An image sensor package, comprising:

a frame having upper and lower surfaces and substantially planar outer side surfaces;

an aperture extending from the upper surface to the lower surface and having at least a first step and at least another, higher step surrounding the aperture;

a semiconductor die having a surface including an optically active region, a back side opposite the optically active region and lateral sides, the semiconductor die substantially disposed in the aperture with the back side joined to the at least a first step, the lateral sides substantially covered by a skirt portion of the frame; and

an optically transmissive window disposed in the aperture and secured to the at least another, higher step.

23. The image sensor package of claim 22, further comprising a plurality of conductors extending through the frame and operably coupled to the semiconductor die.

24. The image sensor package of claim 23, further comprising at least one external connection structure operably coupled to conductors of the plurality.

25. The image sensor package of claim 24, wherein the at least one external connection structure comprises at least one of conductive bumps, conductive pads and a flex circuit bearing conductive elements in contact with the conductors of the plurality.

26. The image sensor package of claim 22, further comprising a lens fixed in an uppermost portion of the aperture.

27. The image sensor package of claim 26, wherein the lens includes a Helimorph actuator for focusing.

28. The image sensor package of claim 26, wherein the lens comprises a microfluidic lens of two immiscible liquids in a hydrophobic tube configured to change focal length responsive to a voltage variation.

29. The image sensor package of claim 26, further comprising a circuit in the semiconductor die for enabling focusing of the lens.

30. The image sensor package of claim 22, wherein at least a portion of the semiconductor die in contact with the frame is covered with a mask material comprising one of an oxide and a nitride.

31. The image sensor package of claim 22, further comprising at least a further, higher step below the at least another, higher step.

32. The image sensor package of claim 31, further comprising an optical component secured to the at least a further, higher step.

33. The image sensor package of claim 32, wherein the optical component comprises one of a lens, a pre-lens and a filter.

34. The image sensor package of claim 22, wherein the frame is formed of at least one of a polymer, a semiconductor material, a ceramic, a metal and an alloy.

35. The image sensor package of claim 22, wherein the semiconductor die includes a plurality of conductive vias extending from the surface to the back side thereof.

36. The image sensor package of claim 35, wherein conductive vias of the plurality are operably coupled to conductors carried by the frame and extending to an exterior surface thereof.

37. The image sensor package of claim 35, wherein the plurality of conductive vias lies within a periphery of the at least a first step, and further including at least one external connection structure operably coupled thereto.

38. The image sensor package of claim 37, wherein the at least one external connection structure comprises at least one of conductive bumps, conductive lands and a flex circuit bearing conductive elements thereon.

39. An image sensor package, comprising:

a frame having upper and lower surfaces and substantially planar outer side surfaces;

an aperture extending from the upper surface to the lower surface and having a lower inverted step surrounding the aperture;

a semiconductor die having an active surface including an optically active region and bond pads disposed peripherally with respect thereto, a back side and lateral sides, the semiconductor die substantially disposed in the aperture with the active surface joined to the lower inverted step, the lateral sides substantially covered by a skirt portion of the frame;

an optically transmissive window disposed over the semiconductor die;

a spacer disposed on the optically transmissive window and at least substantially aligned with the frame; and

another optically transmissive window disposed over the spacer and adjacent the upper surface of the frame.

40. An image sensor package, comprising:

a frame having upper and lower surfaces and substantially planar outer side surfaces;

an aperture extending from the upper surface to the lower surface;

a semiconductor die having an active surface including an optically active region and bond pads disposed peripherally with respect thereto, a back side and lateral sides, the semiconductor die substantially disposed under the aperture with the active surface abutting and secured to the lower surface of the frame;

an optically transmissive window disposed within the aperture;

a spacer disposed on the optically transmissive window and at least substantially aligned with the frame; and

another optically transmissive window disposed over the spacer and having a surface substantially coplanar with the upper surface of the frame.

41. An image sensor package, comprising:

a frame having upper and lower surfaces and substantially planar outer side surfaces;

an aperture extending from the upper surface to the lower surface and having at least a first step surrounding the aperture;

a semiconductor die having a surface including an optically active region, a back side opposite the optically active region and lateral sides, the semiconductor die substantially disposed in the aperture with the back side joined to the at least a first step, the lateral sides substantially covered by a skirt portion of the frame; and

an optically transmissive window disposed over and secured to the upper surface of the frame.