Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
First Claim
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1. An acoustic resonator comprising:
- a substrate;
a first electrode adjacent the substrate;
a piezoelectric layer adjacent the first electrode;
a trench provided in the piezoelectric layer, wherein the trench is configured to reduce energy loss in the acoustic resonator;
a second electrode adjacent the piezoelectric layer, the second electrode lying in a first plane and having an edge; and
an acoustic mirror is disposed in the substrate, wherein the first electrode spans the acoustic mirror.
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Abstract
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, and a second electrode. The substrate has a first surface and the first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material, and the second electrode lies in a first plane and has an edge. The layer of piezoelectric material has a recessed feature adjacent the edge of the second electrode.
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Citations
33 Claims
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1. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate; a piezoelectric layer adjacent the first electrode; a trench provided in the piezoelectric layer, wherein the trench is configured to reduce energy loss in the acoustic resonator; a second electrode adjacent the piezoelectric layer, the second electrode lying in a first plane and having an edge; and an acoustic mirror is disposed in the substrate, wherein the first electrode spans the acoustic mirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An acoustic resonator comprising:
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a substrate having a first surface;
a first electrode adjacent the first surface of the substrate;a layer of piezoelectric material adjacent the first electrode; a trench provided in the layer of piezoelectric material; a second electrode adjacent the layer of piezoelectric material, the second electrode lying in a first plane and having an edge; and a passivation layer adjacent the second electrode, the passivation layer lying in a second plane that is generally parallel to the first plane and having an edge;
wherein the trench is configured to reduce energy loss in the acoustic resonator. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate; a piezoelectric layer adjacent the first electrode; a trench provided in the piezoelectric layer; and a second electrode adjacent the piezoelectric layer, the second electrode lying in a first plane and having an edge, wherein the trench has a depth in the piezoelectric layer that is on the order of hundreds to thousands of angstroms and a width on the order of fractions of a micron to microns. - View Dependent Claims (18)
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19. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate; a piezoelectric layer adjacent the first electrode; a trench provided in the piezoelectric layer; fill material in the trench of the piezoelectric layer; and a second electrode adjacent the piezoelectric layer, the second electrode lying in a first plane and having an edge. - View Dependent Claims (20, 21)
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22. An acoustic resonator comprising:
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a substrate having a first surface;
a first electrode adjacent the first surface of the substrate;a layer of piezoelectric material adjacent the first electrode;
a second electrode adjacent the layer of piezoelectric material, the second electrode lying in a first plane and having an edge; anda passivation layer adjacent the second electrode, the passivation layer lying in a second plane that is generally parallel to the first plane and having an edge;
wherein the layer of piezoelectric material comprises a trench adjacent the edge of the second electrode; andfill material in the trench of the layer of piezoelectric material. - View Dependent Claims (23, 24)
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25. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate; a piezoelectric layer adjacent the first electrode; a trench provided in the piezoelectric layer, wherein the trench is configured to reduce energy loss in the acoustic resonator; a second electrode adjacent the piezoelectric layer, the second electrode lying in a first plane and having an edge; and a depression disposed in the substrate, wherein the first electrode spans the depression. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33)
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Specification