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Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric

  • US 7,791,434 B2
  • Filed: 12/22/2004
  • Issued: 09/07/2010
  • Est. Priority Date: 12/22/2004
  • Status: Expired due to Fees
First Claim
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1. An acoustic resonator comprising:

  • a substrate;

    a first electrode adjacent the substrate;

    a piezoelectric layer adjacent the first electrode;

    a trench provided in the piezoelectric layer, wherein the trench is configured to reduce energy loss in the acoustic resonator;

    a second electrode adjacent the piezoelectric layer, the second electrode lying in a first plane and having an edge; and

    an acoustic mirror is disposed in the substrate, wherein the first electrode spans the acoustic mirror.

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