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Caddie-corner single proof mass XYZ MEMS transducer

  • US 7,793,542 B2
  • Filed: 12/28/2007
  • Issued: 09/14/2010
  • Est. Priority Date: 12/28/2007
  • Status: Expired due to Fees
First Claim
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1. A three-axis MEMS transducer featuring a caddie-corner proof mass, the proof mass comprising:

  • a planar main body portion of conductive material, the main body portion having a width and a length dimension and at least four side edges, wherein an x-axis sense direction is defined from a first side edge to an opposite first side edge and a y-axis sense direction is defined from a second side edge to an opposite second side edge, the x-axis sense direction being perpendicular to the y-axis sense direction, the main body portion further having at least two corners, wherein a first corner of the at least two corners is positioned opposite a second corner of the at least two corners; and

    a planar extra mass caddie-corner feature positioned about the first corner of the main body portion, wherein the extra mass caddie-corner feature and the main body portion comprise a single caddie-corner proof mass having a z-sense pivot axis disposed at an angle of ninety degrees to a diagonal extending from the extra mass corner feature to the second corner of the main body portion, wherein the proof mass is configured to teeter-totter corner to corner about the z-sense pivot axis in response to one of a z-axis acceleration and a z-axis deceleration, and wherein the planar extra mass caddie-corner feature is positioned farther from the z-sense pivot axis than the second corner of the planar main body.

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