Micropump for integrated device for biological analyses
First Claim
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1. A process for manufacturing a vacuum micropump, comprising the steps of:
- a) forming cavities in a substrate of a wafer of semiconductor material; and
b) sealing said cavities at a preset pressure,wherein said step of forming cavities comprises the steps of;
i) forming, on top of said substrate, a mask having sets of openings;
ii) etching said substrate through said sets of openings;
iii) coating exposed portions of said mask with a first layer of said semiconductor material; and
iv) thermally oxidizing said first layer so as to close said first sets of openings.
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Abstract
A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).
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Citations
5 Claims
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1. A process for manufacturing a vacuum micropump, comprising the steps of:
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a) forming cavities in a substrate of a wafer of semiconductor material; and b) sealing said cavities at a preset pressure, wherein said step of forming cavities comprises the steps of; i) forming, on top of said substrate, a mask having sets of openings; ii) etching said substrate through said sets of openings; iii) coating exposed portions of said mask with a first layer of said semiconductor material; and iv) thermally oxidizing said first layer so as to close said first sets of openings. - View Dependent Claims (2, 3, 4, 5)
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Specification