Device for detecting and device for measuring the concentration of a substance

• US 7,795,586 B2
• Filed: 02/27/2003
• Issued: 09/14/2010
• Est. Priority Date: 02/27/2003
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Arndt, Michael, Saettler, Michael, Krummel, Christian, Fischer, Frank
• Primary Examiner(s): Porta; David P
• Assistant Examiner(s): Taningco; Marcus H
• Application Number:
  US10/528,181
• Publication Number:
  US 20070057187A1
• Time in Patent Office: 2,756 Days
• Field of Search: 250/339.13
• US Class Current: 250/339.1
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0256 Compact construction
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 5/10 using electric radiation detectors
• CPC Class Codes: G01J 5/602 using selective, monochromatic or bandpass filtering
• CPC Class Codes: G01N 2021/3137 with selection of wavelengths after the sample
• CPC Class Codes: G01N 2021/3166 using separate detectors and filters
• CPC Class Codes: G01N 2021/317 Special constructive features
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis

Abstract

A device for detecting radiation signals and a device for measuring the concentration of a substance are described, a first detector and a second detector being provided on a first chip, and a first filter and a second filter being provided on a second chip, the first chip and the second chip being connected to one another in hermetically sealed fashion.

Claims

1. A device for measuring a concentration of a substance in a beam path of a radiation source, comprising:

a first detector;

a second detector;

a first chip on which are arranged the first detector and the second detector;

a first filter;

a second filter; and

a second chip on which are arranged the first filter and the second filter;

wherein;

the first chip and the second chip are connected to one another in a hermetically sealed fashion, at least one hermetically sealed region being vertically interposed between the first chip and the second chip; and

a hermetic seal between the first and second chips includes a bonding web connecting the first and second chips.

2. The device as recited in claim 1, wherein:

each of the first detector and the second detector includes one of a thermopile, a temperature-sensitive resistor, and a temperature-sensitive diode.

3. The device as recited in claim 1, further comprising:

an absorber layer provided on at least one of the first detector and the second detector.

4. The device as recited in claim 1, wherein:

the first chip includes a first substrate, and

the first detector and the second detector are thermally decoupled from the first substrate.

5. The device as recited in claim 1, wherein:

at least one of the first filter and the second filter includes a Fabry-Perot filter.

6. The device as recited in claim 1, further comprising:

at least one further detector; and

at least one further filter.

7. The device as recited in claim 1, further comprising:

a self-test mechanism for the device, wherein the self-test mechanism includes at least one heating conductor configured to apply heat to at least one of the first and second detectors.

8. A device for measuring a concentration of a substance in a beam path of a radiation source, comprising:

a first detector;

a second detector;

a first chip on which are arranged the first detector and the second detector;

a first filter;

a second filter; and

a second chip on which are arranged the first filter and the second filter;

wherein;

the first chip and the second chip are connected to one another in a hermetically sealed fashion; and

the first detector and the second detector are hermetically isolated from each other.

9. The device as recited in claim 8, further comprising:

a self-test mechanism for the device, wherein the self-test mechanism includes at least one heating conductor configured to apply heat to at least one of the first and second detectors.

10. A device for detecting a radiation signal, comprising:

a first detector;

a second detector;

a first chip on which are arranged the first detector and the second detector;

a first filter;

a second filter; and

a second chip on which are arranged the first filter and the second filter;

wherein;

the first chip and the second chip are connected to one another in a hermetically sealed fashion, at least one hermetically sealed region being vertically interposed between the first chip and the second chip; and

the first detector and the second detector are hermetically isolated from each other.

11. The device as recited in claim 10, further comprising:

a self-test mechanism for the device, wherein the self-test mechanism includes at least one heating conductor configured to apply heat to at least one of the first and second detectors.