Method and apparatus for backside illuminated image sensors using capacitively coupled readout integrated circuits

• US 7,795,650 B2
• Filed: 12/09/2008
• Issued: 09/14/2010
• Est. Priority Date: 12/09/2008
• Status: Expired due to Fees

• Current Assignee: Teledyne Scientific & Imaging, LLC (Teledyne Technologies Incorporated)
• Original Assignee: Teledyne Scientific & Imaging, LLC (Teledyne Technologies Incorporated)
• Inventors: Eminoglu, Selim, Lauxtermann, Stefan C.
• Primary Examiner(s): Lee; Calvin
• Application Number:
  US12/330,891
• Publication Number:
  US 20100140732A1
• Time in Patent Office: 644 Days
• Field of Search: 438/48, 438/54, 438 78- 79, 250/207, 250/370.9, 257225-234, 257E27076-E27083
• US Class Current: 257/228
• CPC Class Codes: H01L 2224/16145 the bodies being stacked
• CPC Class Codes: H01L 27/14634 Assemblies, i.e. Hybrid structures
• CPC Class Codes: H01L 27/1464 Back illuminated imager structures
• CPC Class Codes: H01L 27/1469 Assemblies, i.e. hybrid integration
• CPC Class Codes: H04N 25/58 involving two or more exposures
• CPC Class Codes: H04N 25/75 Circuitry for providing, modifying or processing image signals from the pixel array
• CPC Class Codes: H04N 25/77 Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
• CPC Class Codes: H04N 25/772 comprising A/D, V/T, V/F, I/T or I/F converters
• CPC Class Codes: H04N 25/79 Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors

Abstract

The images sensor includes a readout circuit capacitatively coupled to a memory circuit. The readout circuit includes: (i) a photon detector to receive a plurality of photons and to provide a charge signal corresponding to the received photons, (ii) a resettable integrator that is reset multiple times over a single exposure time and provides an analog representation of the incident photons during the last integration cycle, and (iii) a comparator that monitors the integrator output and generates a reset pulse when the integrator reaches a built-in threshold value. The memory circuit includes: (i) a receiver circuit that detects the output of the digital driver in the front-end readout circuit via capacitive coupling and generates a digital voltage pulse for each received signal, and (ii) a digital counting memory to count the received pulses to provide a coarse digital representation of how many times the integrator is reset.

Claims

1. A back-side illuminated image sensor having two circuits capacitively coupled to each other at the pixel level, comprising:

a coupling capacitor having a first plate and a second plate;

a first circuit comprising;

an integrator for determining a cumulative signal based on a charge signal for a given exposure time and producing an integrator output signal based on the cumulative signal, and

a comparator, connected to the integrator and the first plate of the capacitor, for producing a comparator output signal that is sent to the first plate of the coupling capacitor when the integrator output signal has reached a threshold level; and

a second circuit comprising a receiver, connected to the second plate of the coupling capacitor, for detecting a plurality of pulses from capacitively coupled signals received from the first circuit,

wherein the first circuit and the second circuit are capacitively coupled to one another via the coupling capacitor.

2. The image sensor of claim 1, wherein the first circuit further comprises a photon detector for receiving a plurality of photons and providing a charge signal corresponding to the received photons.

3. The image sensor of claim 2, wherein the integrator is connected to the photon detector.

4. The image sensor of claim 1, wherein the first circuit further comprises reset logic that sends a reset signal to the integrator when the integrator output signal has reached the threshold level.

5. The image sensor of claim 4, wherein the reset logic includes a digital buffer and a level shifter.

6. The image sensor of claim 1, wherein the capacitively coupled signals are generated for each reset signal.

7. The image sensor of claim 1, further comprising a sample circuit, connected to the integrator, for sampling the integrator output signal at the end of each given exposure time to produce a sampled output.

8. A back-side illuminated image sensor having two circuits capacitively coupled to each other at the pixel level, comprising:

a capacitor having a first plate and a second plate;

a first circuit comprising;

a photon detector for receiving a plurality of photons and providing a charge signal corresponding to the received photons,

an integrator, connected to the photon detector, for determining a cumulative signal based on the charge signal for a given exposure time and producing an integrator output signal based on the cumulative signal, and

a comparator, connected to the integrator and the first plate of the capacitor, for producing a comparator output signal that is sent to the first plate of the capacitor when the integrator output signal has reached a threshold level; and

a second circuit comprising;

a receiver, connected to the second plate of the capacitor, for detecting a plurality of pulses from capacitively coupled signals received from the first circuit, and

a counter, connected to the receiver, for counting the plurality of pulses detected by the receiver;

wherein the first circuit and the second circuit are capacitively coupled to one another via the capacitor.

9. The image sensor of claim 8, wherein the first circuit further comprises reset logic that sends a reset signal to the integrator when the integrator output signal has reached the threshold level.

10. The image sensor of claim 9, wherein the reset logic includes a digital buffer and a level shifter.

11. The image sensor of claim 8, wherein the capacitively coupled signals are generated for each reset signal.

12. The image sensor of claim 8, further comprising a sample circuit, connected to the integrator, for sampling the integrator output signal at the end of each given exposure time to produce a sampled output.

13. The image sensor of claim 12, further comprising an analog driver, connected to the sample circuit, for buffering the sampled outputs to drive a shared analog bus.

14. The image sensor of claim 13, wherein the shared analog bus routes analog pixel values of a column to the first circuit when a given row is selected.

15. The image sensor of claim 8, wherein the first circuit produces an output that corresponds to a least significant bit portion of an analog-to-digital converter.

16. The image sensor of claim 15, wherein the second circuit produces an output that corresponds to a most significant bit portion of the analog-to-digital converter.

17. The image sensor of claim 16, wherein the output of the first circuit can be combined with the output of the second circuit to produce a digital representation of an image.

18. The image sensor of claim 8, wherein the counter counts the number of resets of the first circuit.

19. The image sensor of claim 8, wherein the first circuit provides signal conditioning for offset and gain adjustments and further comprises a multiplexing circuit that is integrated in columns on top of a pixel area followed by an analog video driver or an on-chip analog-to-digital converter.

20. The image sensor of claim 8, further comprising a digital driver, located in the pixel area, that transmits counting memory bits via a shared digital output bus connected to the first circuit, which is arranged in columns on top of the pixel area of the second circuit.