Method and apparatus for two-axis, high-speed beam steering

• US 7,796,314 B2
• Filed: 03/08/2005
• Issued: 09/14/2010
• Est. Priority Date: 03/08/2004
• Status: Expired due to Fees

• Current Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Original Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Inventors: Sutko, John L., Publicover, Nelson George
• Primary Examiner(s): Phan; James
• Application Number:
  US10/592,035
• Publication Number:
  US 20080123169A1
• Time in Patent Office: 2,016 Days
• Field of Search: 3591981-2021, 3592131-2151, 359/223.1, 359/224.2
• US Class Current: 359/198.1
• CPC Class Codes: G02B 21/0048 scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors

Abstract

Dual axis, beam-steering devices are disclosed. An exemplary device includes a support platform having a top surface. A reflective surface is coupled to the top surface of the support platform. First and second galvanometers are coupled via respective linkages to the support platform such that the first galvanometer rotates the support platform about a first rotational axis, and the second galvanometer rotates the support platform about a second rotational axis that is orthogonal to the first rotational axis. The support platform can be simultaneously rotated with respect to both the first rotational axis and the second rotational axis to steer a beam of electromagnetic energy (e.g. light beam) reflected by the reflective surface.

Claims

1. A two-axis, beam-steering device, comprising:

a support platform having a top surface;

a reflective surface situated on the top surface of the support platform;

a first galvanometer having a first rotational shaft which defines a first fixed rotational axis;

a second galvanometer having a second rotational shaft which defines a second fixed rotational axis oriented substantially orthogonally to the first rotational axis;

a first linkage extending along the first rotational axis and coupling the first galvanometer to the support platform; and

a second linkage extending along the second rotational axis and coupling the second galvanometer to the support platform, the first galvanometer being situated relative to the support platform so as to rotate the support platform about the first rotational axis, and the second galvanometer being situated relative to the support platform so as to rotate the support platform about the second rotational axis, thereby providing simultaneous rotation of the support platform about the first and second rotational axes as the reflective surface reflects a beam of electromagnetic energy incident to the reflective surface.

2. The beam-steering device of claim 1, wherein:

the reflective surface has a center; and

the first and second rotational axes intersect at the center.

3. The beam-steering device of claim 1, further comprising a position sensor situated and configured to determine a position of the reflective surface relative to a fixed reference.

4. The beam-steering device of claim 3, wherein the position sensor is situated and configured to determine the position of the reflective surface relative to the fixed reference comprising the first and second rotational axes.

5. The beam-steering device of claim 3, wherein the position sensor comprises:

a first rotational-position sensor situated and configured to determine a rotational position of the first linkage about the first rotational axis; and

a second rotational-position sensor situated and configured to determine a rotational position of the second linkage about the second rotational axis.

6. The beam-steering device of claim 5, wherein the first and second rotational position sensors produce respective positional feedback data from which a position of the reflective surface is determined.

7. The beam-steering device of claim 3, wherein the position sensor comprises an optical detector situated and configured to detect electromagnetic radiation reflected from the reflective surface, to produce corresponding light-position data, and to correlate the light-position data with a corresponding position of the reflective element.

8. The beam-steering device of claim 3, wherein the position sensor comprises a capacitance detector situated and configured to obtain data regarding electrical capacitance between the support platform and the fixed reference.

9. The beam-steering device of claim 8, wherein the capacitance detector comprises at least one electrostatically charged silicon comb situated between the support platform and the fixed reference.

10. The beam-steering device of claim 1, further comprising:

a first passive linkage extending along the first rotational axis and coupling the support platform, on a side of the support platform opposite the first linkage, in a pivotable manner to a fixed support; and

a second passive linkage extending along the second rotational axis and coupling the support platform, on a side of the support platform opposite the second linkage, in a pivotable manner to the fixed support.

11. The beam-steering device of claim 1, further comprising:

a third galvanometer situated on the first fixed rotational axis but on a side of the support platform opposite the first linkage;

a third linkage extending along the first rotational axis but on a side of the support platform opposite the first linkage, the third linkage coupling the third galvanometer to the support platform;

a fourth galvanometer situated on the second fixed rotational axis but on a side of the support platform opposite the second linkage; and

a fourth linkage extending along the second rotational axis but on a side of the support platform opposite the second linkage, the fourth linkage coupling the fourth galvanometer to the support platform.

12. The beam-steering device of claim 11, wherein:

the first galvanometer is wired for rotation, when electrically energized, in a first rotational direction;

the third galvanometer is wired for rotation, when electrically energized, in a third rotational direction that is opposite the first rotational direction;

the second galvanometer is wired for rotation, when electrically energized, in a second rotational direction; and

the fourth galvanometer is wired for rotation, when electrically energized, in a fourth rotational direction that is opposite the second rotational direction.

13. The beam-steering device of claim 1, further comprising a heat-sink in thermal contact with the first and second galvanometers to conduct heat from the first and second galvanometer.

14. The beam-steering device of claim 1, wherein:

the first linkage comprises a first section and a first compressible member located between the first linkage and the support platform, the first compressible member being configured to provide a variable length of the first section and the first compressible member; and

the second linkage comprises a second section and a second compressible member located between the second linkage and the support platform, the second compressible member being configured to provide a variable length of the second section and the second compressible member.

15. The beam-steering device of claim 14, wherein:

the first linkage is substantially non-compliant in rotation about the second rotational axis and has a variable length to permit rotation of the support platform about the first rotational axis; and

the second linkage is substantially non-compliant in rotation about the first rotational axis and has a variable length to permit rotation of the support platform about the second rotational axis.

16. The beam-steering device of claim 1, wherein:

the support platform comprises first and second inserts coupled to the support platform, the first insert extending along the first rotational axis, and the second insert extending along the second rotational axis;

the first linkage comprises a first connecting interface configured for receiving the first insert; and

the second linkage comprises a second connecting interface configured for receiving the second insert.

17. The beam-steering device of claim 16, further comprising:

a first pin configured to secure the first insert to the first connecting interface, the first pin extending, substantially perpendicularly to the first rotational axis, through a slot in the first insert and affixed to the first connecting interface; and

a second pin configured to secure the second insert to the second connecting interface, the second pin extending, substantially perpendicularly to the second rotational axis, through a slot in the second insert and affixed to the second connecting interface;

wherein each slot is curved in a manner allowing the respective pin to engage the respective insert at any of various positions in an angular range within the curved slot.

18. The beam-steering device of claim 1, wherein the reflective surface is of a reflective element mounted to the support platform.

19. The beam-steering device of claim 1, wherein the support platform is rotatable by the galvanometers over a total mechanical angle of at least four degrees about each of the rotational axes.

20. The beam-steering device of claim 1, wherein the support platform is rotatable by the galvanometers at a frequency of at least 1.5 kHz.

21. The beam-steering device of claim 1, further comprising:

a first flexure mounted to the first linkage between the support platform and the first galvanometer; and

a second flexure mounted to the second linkage between the support platform and the second galvanometer.