Encoded microparticles and a method for fabricating

• US 7,796,333 B2
• Filed: 09/23/2008
• Issued: 09/14/2010
• Est. Priority Date: 11/17/2004
• Status: Active Grant

• Current Assignee: Illumina Incorporated
• Original Assignee: Illumina Incorporated
• Inventors: Kersey, Alan D., Putnam, Martin A., Moon, John A.
• Primary Examiner(s): Lavarias; Arnel C
• Application Number:
  US12/235,834
• Publication Number:
  US 20090073520A1
• Time in Patent Office: 721 Days
• Field of Search: None
• US Class Current: 359/566
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
• CPC Class Codes: G02B 5/203 having holographic or diffractive elements diffraction gratings per se G02B5/18; holographic elements per se G02B5/32; generating the spectrum using diffraction elements G01J3/18
• CPC Class Codes: G03F 7/001 Phase modulating patterns, e.g. refractive index patterns
• CPC Class Codes: G03H 1/18 Particular processing of hologram record carriers, e.g. for obtaining blazed holograms photographic processing in general G03C, G03D
• CPC Class Codes: G03H 1/182 Post-exposure processing, e.g. latensification
• CPC Class Codes: G03H 2230/10 Microhologram not registered to the substrate
• CPC Class Codes: Y10S 359/90 Methods
• CPC Class Codes: Y10T 428/2982 Particulate matter [e.g., sphere, flake, etc.]
• CPC Class Codes: Y10T 428/2991 Coated
• CPC Class Codes: Y10T 436/143333 Saccharide [e.g., DNA, etc.]

Abstract

A method for fabricating microparticles. The method includes providing a removable substrate that has a photosensitive material. The substrate has a plurality of inner regions. Each inner region surrounds a corresponding outer region. The method also includes providing at least one optically detectable code within at least one of the inner regions of the substrate and etching lines into the substrate to create a plurality of microparticles having at least one optically detectable code therein. The microparticles have elongated bodies that extend in an axial direction. The optically detectable codes extend in the axial direction within the microparticles.

Claims

1. A method for fabricating microparticles comprising:

providing a base substrate including a particle layer thereon, the particle layer having a photosensitive material;

providing optically detectable codes in the photosensitive material of the particle layer; and

etching lines into the particle layer to create a plurality of microparticles, the microparticles having inner and outer regions, each inner region being surrounded by a corresponding outer region formed from the particle layer and including at least one of the optically detectable codes therein, the microparticles having elongated bodies that extend in an axial direction, the optically detectable codes extending in the axial direction within the microparticles.

2. The method in accordance with claim 1, wherein each of the inner regions is enclosed within and surrounded by the corresponding outer region.

3. The method in accordance with claim 1 wherein at least one of the optically detectable codes is defined by a grating that is formed in the corresponding inner region.

4. The method in accordance with claim 1 wherein the optically detectable codes are provided by modifying portions of the corresponding inner regions to reflect light in a predetermined optical output pattern.

5. The method in accordance with claim 1 wherein at least one of the optically detectable codes is defined by a diffraction grating.

6. The method in accordance with claim 1 further comprising releasing the microparticles from the base substrate.

7. The method in accordance with claim 1 wherein said etching the lines into the particle layer includes etching the lines such that the optically detectable codes extend along the axial direction and through a center of the elongated body.

8. The method in accordance with claim 1 wherein said etching the lines into the particle layer includes using photolithography.

9. The method in accordance with claim 1 wherein the optically detectable codes are one of written, impressed, embedded, imprinted, etched, grown, and deposited within the inner regions.

10. The method in accordance with claim 1 wherein the optically detectable codes include gratings that are etched within the inner regions.

11. The method in accordance with claim 1 wherein the optically detectable codes constitute digital codes.

12. The method in accordance with claim 1 wherein the microparticles have corresponding longitudinal axes extending in the axial direction through the inner regions, the outer region extending around the longitudinal axis of the corresponding inner region.

13. The method in accordance with claim 12 wherein said etching the lines into the particle layer includes etching the lines such that the elongated bodies are rectangular and have a substantially square cross-section taken transverse to the longitudinal axis.

14. The method in accordance with claim 12 wherein the outer region completely surrounds the inner region about the longitudinal axis.

15. The method in accordance with claim 1 wherein the optically detectable codes are periodic or aperiodic variations in at least one of a refractive index and an optical absorption of the corresponding inner regions.

16. The method in accordance with claim 1 wherein the optically detectable codes are distributed apart from each other within the particle layer.

17. The method in accordance with claim 1 wherein the optically detectable codes are separated by a layer material in the particle layer, the layer material becoming the outer regions when the particle layer is etched.

18. The method in accordance with claim 1 wherein the optically detectable codes are oriented in a common direction within the particle layer.

19. The method in accordance with claim 1 wherein the plurality of microparticles is a first plurality of microparticles, a second plurality of microparticles being created when the particle layer is etched, wherein the first plurality of microparticles have optically detectable codes oriented in a first direction and the second plurality of microparticles have optically detectable codes oriented in a different second direction.

20. The method in accordance with claim 1 wherein the outer region comprises a transparent solid material, wherein light is transmitted through the outer region and reflected or filtered by the optically detectable code.

21. The method in accordance with claim 1 wherein the outer region provides mechanical or structural support of the inner region.

22. The method in accordance with claim 1 wherein the optically detectable codes are provided in the photosensitive material of the particle layer after the base substrate having the particle layer thereon is provided.

23. A method for fabricating microparticles comprising:

providing a removable base substrate including a particle layer thereon, the particle layer having a photosensitive material, the particle layer including optically detectable codes embedded in predetermined regions of the particle layer; and

etching lines into the particle layer to create a plurality of microparticles, the predetermined regions becoming inner regions of the microparticles when the particle layer is etched, the inner regions having at least one of the optically detectable codes therein, the microparticles also having outer regions formed from the particle layer that surround the inner regions, the microparticles having elongated bodies that extend in an axial direction, the optically detectable codes extending in the axial direction within the microparticles.

24. The method in accordance with claim 23 wherein the optically detectable codes are distributed apart from each other within the particle layer.

25. The method in accordance with claim 23 wherein the optically detectable codes are separated by a layer material in the particle layer, the layer material becoming the outer regions when the particle layer is etched.

26. The method in accordance with claim 23 wherein the optically detectable codes are oriented in a common direction within the particle layer.

27. The method in accordance with claim 23 wherein at least one of the optically detectable codes is defined by a grating that is formed in the corresponding inner region.

28. The method in accordance with claim 23 further comprising providing the optically detectable codes within the particle layer.

29. The method in accordance with claim 28 wherein the optically detectable codes are provided by modifying portions of the corresponding inner regions to reflect light in a predetermined optical output pattern.

30. The method in accordance with claim 23 wherein at least one of the optically detectable codes is defined by a diffraction grating.

31. The method in accordance with claim 23 further comprising releasing the microparticles from the base substrate.

32. The method in accordance with claim 23 wherein the optically detectable codes are one of written, impressed, embedded, imprinted, etched, grown, and deposited within the inner regions.

33. The method in accordance with claim 23 wherein the optically detectable codes constitute digital codes.

34. The method in accordance with claim 23 wherein the optically detectable codes include gratings that are etched within the inner regions.

35. The method in accordance with claim 23 wherein the microparticles have corresponding longitudinal axes extending in the axial direction through the inner regions, the outer region extending around the longitudinal axis of the corresponding inner region.

36. The method in accordance with claim 35 wherein the outer region completely surrounds the inner region about the longitudinal axis.

37. The method in accordance with claim 35 wherein said etching the lines into the particle layer includes etching the lines such that the elongated bodies are rectangular and have a substantially square cross-section taken transverse to the longitudinal axis.

38. The method in accordance with claim 23 wherein the optically detectable codes are periodic or aperiodic variations in at least one of a refractive index and an optical absorption of the corresponding inner regions.

39. The method in accordance with claim 23 wherein the outer region comprises a transparent solid material, wherein light is configured to be transmitted through the outer region and reflected or filtered by the optically detectable code.

40. The method in accordance with claim 39 wherein the outer regions provide mechanical or structural support of the corresponding inner regions.