Shape measurement device probe and shape measurement device
First Claim
1. A shape measurement device probe comprising:
- a measuring surface contacting unit including an arm and a stylus, the stylus being arranged at a distal end of the arm and contacting a surface to be measured of a measuring object;
an attachment member for attaching the measuring surface contacting unit to the shape measurement device;
a connecting mechanism including a supporting point member arranged in the measuring surface contacting unit and a mounting platform fixed to the attachment member and to be mounted with the supporting point member, for connecting the measuring surface contacting unit and the attachment member in a swinging manner with the supporting point member as a supporting point; and
a biasing mechanism including a movable side member arranged on the measuring surface contacting unit and a fixed side member arranged on the attachment member, the movable side member and the fixed side member being arranged to face each other in a vertical direction and configured to generate magnetic attraction force in a non-contacting state, the biasing mechanism biasing the measuring surface contacting unit such that the arm is directed in the vertical direction by the magnetic attraction force.
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Accused Products
Abstract
There are provided a shape measurement device capable of measuring shapes irrespective of an inclined direction of a side surface without using a complex device configuration, and a shape measurement device probe arranged in the shape measurement device. In the shape measurement device probe, a connecting mechanism for connecting an attachment member and a swinging member includes a supporting point member arranged on the swinging member and a mounting platform arranged on the attachment member, and connects the swinging member to the attachment member so as to be inclinable in any direction. The attachment member and the swinging member are configured such that a movable side member arranged on the swinging member and a fixed side member arranged on the attachment member generate magnetic attraction force in a non-contacting state with respect to each other, where the arm of the swinging member is biased so as to be directed in the vertical direction by the magnetic attraction force. According to this configuration, a side surface shape inclined in any direction of XY directions and substantially parallel to the Z-direction can be measured.
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Citations
13 Claims
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1. A shape measurement device probe comprising:
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a measuring surface contacting unit including an arm and a stylus, the stylus being arranged at a distal end of the arm and contacting a surface to be measured of a measuring object; an attachment member for attaching the measuring surface contacting unit to the shape measurement device; a connecting mechanism including a supporting point member arranged in the measuring surface contacting unit and a mounting platform fixed to the attachment member and to be mounted with the supporting point member, for connecting the measuring surface contacting unit and the attachment member in a swinging manner with the supporting point member as a supporting point; and a biasing mechanism including a movable side member arranged on the measuring surface contacting unit and a fixed side member arranged on the attachment member, the movable side member and the fixed side member being arranged to face each other in a vertical direction and configured to generate magnetic attraction force in a non-contacting state, the biasing mechanism biasing the measuring surface contacting unit such that the arm is directed in the vertical direction by the magnetic attraction force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification