Integrated circuit interconnects with coaxial conductors

• US 7,798,817 B2
• Filed: 11/06/2006
• Issued: 09/21/2010
• Est. Priority Date: 11/04/2005
• Status: Expired due to Fees

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Spencer, Todd, He, Ate, Cupta, Mark, Bakir, Muhannad, Kohl, Paul A.
• Primary Examiner(s): Prasad; Chandrika
• Application Number:
  US11/557,073
• Publication Number:
  US 20070105429A1
• Time in Patent Office: 1,415 Days
• Field of Search: 439/65, 439/66, 438/106, 438/618, 438/622, 438/667
• US Class Current: 439/66
• CPC Class Codes: H01L 21/7682 the dielectric comprising air gaps
• CPC Class Codes: H01L 2223/6627 Waveguides, e.g. microstrip line, strip line, coplanar line
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 23/5225 Shielding layers formed together with wiring layers
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 2924/1903 including wave guides
• CPC Class Codes: H01L 2924/3011 Impedance
• CPC Class Codes: H01P 1/047 Strip line joints
• CPC Class Codes: H05K 1/0219 Printed shielding conductors for shielding around or between signal conductors, e.g. coplanar or coaxial printed shielding conductors
• CPC Class Codes: H05K 2201/09809 Coaxial layout
• CPC Class Codes: H05K 3/4644 by building the multilayer layer by layer, i.e. build-up multilayer circuits making via holes in the insulating layers H05K3/0011; special circuit boards as base or core whereon the multilayer is built H05K3/4602

Abstract

High performance interconnect devices, structures, and fabrication methods are provided herein. According to some embodiments of the present invention, an interconnect device used to connect components or route signals in an integrated circuit can comprise multiple conductors. A first conductor of the interconnect device can define a first conductor axis, and a second conductor of the interconnect device can define a second conductor axis. The second conductor can be proximate the first conduct such that first conductor axis is substantially coaxially situated relative to the second conductor axis to provide a high performance interconnect having a coaxial alignment. The first conductor and the second conductor can define a gap disposed between and separating the conductors. Other embodiments are also claimed and described.

Claims

1. An integrated circuit interconnect structure, the structure comprising:

a first conductor of an interconnect;

a second conductor of an interconnect;

a first layer of suspension material that defines a first gap in a region disposed below the first layer of suspension material; and

a second layer of suspension material stacked on the first layer of suspension material, the second layer of suspension material defining a second gap stacked above the first gap, and

wherein the second gap is enclosed by the second layer of suspension material and the first layer of suspension material; and

wherein the first conductor and the second conductor are contained within at least one of the first gap and the second gap and are spaced apart from each other in the first gap or the second gap.

2. The integrated circuit interconnect structure of claim 1, further comprising an outer conductor disposed at least partially around the first and second layers of suspension material.

3. The integrated circuit interconnect structure of claim 1, wherein the first conductor and the second conductor are independent conductors configured to carry multiple data signals.

4. The integrated circuit interconnect structure of claim 1, wherein the first gap and the second gap comprise air.

5. The integrated circuit interconnect structure of claim 1, further comprising a third conductor generally placed around the first and second layers of suspension material and a fourth conductor disposed below the first layer of suspension material such that the third and fourth conductors form an outer shell.

6. An integrated circuit interconnect structure, the structure comprising:

a first layer of suspension material placed on a substrate, the first layer of suspension material defining a first gap between an underside of the first layer of suspension material and the substrate;

a second layer of suspension material stacked on the first layer of suspension material, the second layer of suspension material defining a second gap disposed between an underside of the second layer of suspension material and a topside of the first layer of suspension material; and

wherein the second gap is enclosed by the second layer of suspension material and the first layer of suspension material; and

a pair of independent, spaced apart conductors disposed on at least one of the top side of the first layer of suspension material in the second gap such the spaced apart conductors are co-located in the second gap or in the first gap below the first layer of suspension material such that the spaced apart conductors are co-located in the first nap.

7. The integrated circuit interconnect structure of claim 6, further comprising an outer conductor disposed on exterior edges of the first and second layers of suspension material such that the outer conductor is located outside of the first and second gaps.

8. The integrated circuit interconnect structure of claim 6, wherein the first and second gaps comprise air.

9. The integrated circuit interconnect structure of claim 6 further comprising an outer shell that is situated in coaxial arrangement with the pair of independent, spaced apart conductors, the outer shell comprising a first outer conductor disposed on the external edges of the first and second layers of suspension material and a second outer conductor disposed below the first gap, the second outer conductor being spaced apart from the first outer conductor by the first layer of suspension material.

10. The integrated circuit interconnect structure of claim 6, wherein the second gap encases the pair of independent, spaced apart conductors when said conductors are disposed on the top side of the first layer of suspension material.

11. An integrated circuit interconnect structure, the structure comprising:

a first conductor of an interconnect spaced apart from a second conductor of an interconnect, the first conductor and the second conductor having different electrical potential such that the conductors are independent conductors; and

a layer of suspension material arranged to segment a gap region of the interconnect into an upper gap region and a lower gap region, wherein the upper gap region is disposed to be stacked on the lower gap region, and

wherein the upper gap region defines a first enclosed volume that is enclosed off from the lower gap region by the layer of suspension material and the lower gap region defines a second enclosed volume that is enclosed off from the upper gap region by the layer of suspension material,

and wherein the first conductor and the second conductor are co-located and disposed in at least one of the upper gap region and the lower gap region.

12. The integrated circuit interconnect structure of claim 11, wherein the lower gap region and the upper gap region comprise air, and the air in the being disposed between the first conductor and the second conductor.

13. The integrated circuit interconnect structure of claim 11, further comprising a second layer of suspension material stacked on the layer of suspension material, the second layer of suspension material defining the upper gap region.

14. The integrated circuit interconnect structure of claim 11, wherein the first conductor and the second conductor are configured to carry multiple data signals.

15. The integrated circuit interconnect structure of claim 11, further comprising an outer shell that surrounds and encases the upper and lower gap regions.