Lighting apparatus, exposure apparatus and microdevice manufacturing method
First Claim
1. An illumination apparatus for illuminating a surface to be irradiated with illumination light emitted from a light source, the illumination apparatus comprising:
- a reflection type fly-eye optical system, between the light source and the surface to be irradiated, the fly-eye optical system having a plurality of reflection partial optical systems for wavefront-dividing a light beam from the light source and superposing divided portions of the light beam onto each other on the surface to be irradiated; and
a reflection type optical system, between the light source and the reflection type fly-eye optical system, for guiding the illumination light to the reflection type fly-eye optical system,wherein the reflection type optical system has a reflecting surface, at least partly constructed by a diffusing surface, the diffusing surface guiding an incident light beam to the reflection type fly-eye optical system, andwherein a diffusion angle of the diffusing surface is such an angle that a full width at half maximum of a range in which a light beam diffused from a point on the diffusing surface by the diffusing surface reaches an entrance surface of the reflection type fly-eye optical system is D/2 to D/100, where D is the entrance diameter of the fly-eye optical system.
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Accused Products
Abstract
An illumination apparatus for illuminating a surface (M) to be irradiated with illumination light emitted from a light source (2) comprises a reflection type fly-eye optical systems (12, 14) disposed between the light source (2) and the surface (M) to be irradiated and constituted by a plurality of reflection partial optical systems for wavefront-dividing a light beam from the light source (2) and superposing divided portions of the light beam onto each other on the surface (M) to be irradiated and a reflection type optical system (10) disposed between the light source (2) and the reflection type fly-eye optical systems (12, 14) for guiding the illumination light to the reflection type fly-eye optical systems (12, 14). The reflection type optical system (10) has a reflecting surface at least partly constructed by a diffusing surface.
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Citations
16 Claims
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1. An illumination apparatus for illuminating a surface to be irradiated with illumination light emitted from a light source, the illumination apparatus comprising:
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a reflection type fly-eye optical system, between the light source and the surface to be irradiated, the fly-eye optical system having a plurality of reflection partial optical systems for wavefront-dividing a light beam from the light source and superposing divided portions of the light beam onto each other on the surface to be irradiated; and a reflection type optical system, between the light source and the reflection type fly-eye optical system, for guiding the illumination light to the reflection type fly-eye optical system, wherein the reflection type optical system has a reflecting surface, at least partly constructed by a diffusing surface, the diffusing surface guiding an incident light beam to the reflection type fly-eye optical system, and wherein a diffusion angle of the diffusing surface is such an angle that a full width at half maximum of a range in which a light beam diffused from a point on the diffusing surface by the diffusing surface reaches an entrance surface of the reflection type fly-eye optical system is D/2 to D/100, where D is the entrance diameter of the fly-eye optical system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An illumination method for illuminating a surface to be irradiated with illumination light emitted from a light source, the illumination method comprising:
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wavefront-dividing a light beam from the light source and superposing divided portions of the light beam onto each other on the surface to be irradiated by a reflection type fly-eye optical system, between the light source and the surface to be irradiated, the fly-eye optical system having a plurality of reflection partial optical systems; and guiding the illumination light to the reflection type fly-eye optical system by a reflection type optical system, between the light source and the reflection type fly-eye optical system; wherein the reflection type optical system has a reflecting surface, at least partly constructed by a diffusing surface, the diffusing surface guiding an incident light beam to the reflection type fly-eye optical system, and wherein a diffusion angle of the diffusing surface is such an angle that a full width at half maximum of a range in which a light beam diffused from a point on the diffusing surface by the diffusing surface reaches an entrance surface of the reflection type fly-eye optical system is D/2 to D/100, where D is the entrance diameter of the fly-eye optical system. - View Dependent Claims (14, 15, 16)
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Specification