Methods for making holographic reticles for characterizing optical systems

• US 7,804,601 B2
• Filed: 10/25/2004
• Issued: 09/28/2010
• Est. Priority Date: 06/24/1999
• Status: Expired due to Fees

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Hansen, Matthew E.
• Primary Examiner(s): LEE, HWA S
• Application Number:
  US10/972,170
• Publication Number:
  US 20050083532A1
• Time in Patent Office: 2,164 Days
• Field of Search: 359 9- 11, 359/15, 359/12, 359/16, 356457-458, 356/515, 356/521
• US Class Current: 356/521
• CPC Class Codes: G03F 7/70375 Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
• CPC Class Codes: G03F 7/706 Aberration measurement
• CPC Class Codes: G03F 7/70616 Monitoring the printed patterns

Abstract

Characterization of an optical system is quickly and easily obtained in a single acquisition step by obtaining image data within a volume of image space. A reticle and image plane are positioned obliquely with respect to each other such that a reticle having a plurality of feature sets thereon, including periodic patterns or gratings, is imaged in a volume of space, including the depth of focus. Metrology tools are used to analyze the detected or recorded image in the volume of space through the depth of focus in a single step or exposure to determine the imaging characteristics of an optical system. Focus, field curvature, astigmatism, spherical, coma, and/or focal plane deviations can be determined. The present invention is particularly applicable to semiconductor manufacturing and photolithographic techniques used therein, and is able to quickly characterize an optical system in a single exposure with dramatically increased data quality and continuous coverage of the full parameter space. In embodiments, the test reticle is holographically generated by interfering two or more beams of optical radiation. The resulting interference pattern is recorded on a reticle and used for testing the optical system. The geometry of the holographic interference pattern is tightly controlled by the properties of the interfering beams and is therefore more accurate than conventional reticle writing techniques.

Claims

1. A method for characterizing an optical system using a holographic reticle, the method comprising:

receiving two beams of coherent optical radiation;

adjusting a first beam to have a cylindrical wavefront;

adjusting a second beam to have a planewave wavefront;

interfering said two beams, resulting in an interference volume of optical radiation having an interference pattern;

recording said interference pattern in a recording medium to create said holographic reticle;

configuring said optical system such that a first plane that includes said holographic reticle is positioned obliquely to a second plane where an image is recorded;

placing said holographic reticle in a path of an optical beam within said optical system; and

recording the image produced by the path of the optical beam passing through said holographic reticle;

wherein the image is configured to characterize said optical system for at least one of field curvature, astigmatism, coma, distortion, telecentricity, spherical aberrations, and variation of coherence.

2. The method of claim 1, said receiving step further comprising:

receiving a single beam of coherent optical radiation; and

splitting said single beam into said two or more beams of optical radiation.

3. The method of claim 1, wherein said recording step further comprises generating a grating on said holographic reticle.

4. The method of claim 1, wherein said recording step comprises generating a grating on said holographic reticle that includes linewidths and spacings that are based on properties of said interfering beams.

5. The method of claim 1, further comprising:

adjusting a wavefront of one or more of said beams prior to said interfering step, in accordance with a desired interference pattern.

6. The method of claim 5, wherein said adjusting step comprises spatially filtering said one or more beams.

7. The method of claim 1, wherein said interfering step comprises interfering said first beam and said second beam, thereby producing an interference pattern that generates a chirped grating with a controlled pitch variation on said holographic reticle.

8. The method of claim 1, wherein said recording step comprises generating a test reticle having said interference pattern.

9. The method of claim 1, wherein a geometry of the interference pattern is based on relative beam angles of the first and second beams of radiation before and after the interfering step, wavelengths and wavefront variations of the first and second beams.

29. The method of claim 1, wherein said recording step comprises generating a polygonal grating on said holographic reticle.

10. A method for characterizing an optical system using a holographic reticle, the method comprising:

receiving two beams of coherent optical radiation;

adjusting a first beam to have a spherical wavefront;

adjusting a second beam to have a planewave wavefront;

interfering said two beams, resulting in an interference volume of optical radiation having an interference pattern;

recording said interference pattern in a recording medium to create said holographic reticle;

configuring said optical system such that a first plane that includes said holographic reticle is positioned obliquely to a second plane where an image is recorded;

placing said holographic reticle in a path of an optical beam within said optical system; and

recording the image produced by the path of the optical beam passing through said holographic reticle;

wherein the image is configured to characterize said optical system for at least one of field curvature, astigmatism, coma, distortion, telecentricity, spherical aberrations, and variation of coherence.

11. The method of claim 10, wherein said interfering step comprises interfering said first beam and said second beam, resulting in a zone plate array interference pattern.

12. A method for characterizing an optical system using a holographic reticle, the method comprising:

receiving two beams of coherent optical radiation;

interfering said two beams, resulting in an interference volume of optical radiation having an interference pattern;

exposing photo-resist that is deposited on a reticle with said interference pattern;

developing said photo-resist so that said reticle reflects said interference pattern thereby forming said holographic reticle;

configuring said optical system such that a first plane that includes said holographic reticle is positioned obliquely to a second plane where an image is recorded;

placing said holographic reticle in a path of an optical beam within said optical system; and

recording the image produced by the path of the optical beam passing through said holographic reticle;

wherein the image is configured to characterize said optical system for at least one of field curvature, astigmatism, coma, distortion, telecentricity, spherical aberrations, and variation of coherence.

13. A method for making a holographic reticle that characterizes an optical system, the method comprising:

receiving two beams of coherent optical radiation;

interfering said two beams, resulting in an interference volume of optical radiation having an interference pattern;

generating a grating;

generating precision phase shifts between adjacent grating patches to monitor image shifting aberrations; and

recording said interference pattern in a recording medium to create said holographic reticle;

wherein said holographic reticle is adapted to yield information on optical parameters of the optical system and thereby characterize the optical system.

14. The method in claim 13, wherein said generating precision phase shifts step comprises phase shifting a holographic reference beam relative to an object beam.

15. The method of claim 14, further comprising using an electro-deformable device to perform said phase shifting.

16. The method of claim 14, further comprising using an acoustic-optic device to perform said phase shifting.

17. The method of claim 14, further comprising using a nano-actuated optic device to perform said phase shifting.

18. The method of claim 17, wherein said nano-actuated optic device is one of a piezo-driven mirror and a bimorph-driven mirror.

19. The method of claim 14, further comprising using one of a reflective array, a refractive array, a diffractive array, a nano-deformable reflective array, a nano deformable refractive array, and a nano deformable diffractive array to perform said phase shifting.

20. The method of claim 14, further comprising using one of a MEMS minor array and an electro-deformable hologram to perform said phase shifting.

21. The method of claim 14, further comprising using an electronic fringe-locking system to perform said phase shifting.

22. The method of claim 13, wherein the optical parameters include at least one of focus, field of curvature, astigmatism, coma, focal plane deviation, spherical aberration and coherence variation.

23. A method for characterizing an optical system using a holographic reticle, the method comprising the steps of:

receiving two beams of coherent optical radiation;

expanding two of said beams, resulting in two diverging spherical wavefronts;

interfering said two beams, resulting in an interference volume of optical radiation having an interference pattern;

recording said interference pattern in a recording medium to create said holographic reticle;

configuring said optical system such that a first plane that includes said holographic reticle is positioned obliquely to a second plane where an image is recorded;

placing said holographic reticle in a path of an optical beam within said optical system; and

recording the image produced by the path of the optical beam passing through said holographic reticle;

wherein the image is configured to characterize said optical system for at least one of field curvature, astigmatism, coma, distortion, telecentricity, spherical aberrations, and variation of coherence.

24. The method of claim 23, wherein said recording step comprises generating a linear grating on said holographic reticle having a substantially constant pitch.

25. The method of claim 23, wherein said recording step comprises generating a linear grating on said holographic reticle having a substantially constant pitch and a duty cycle that varies.

26. The method of claim 23, wherein said recording step further comprises generating a linear grating on said holographic reticle.

27. The method of claim 23, wherein said adjusting step comprises spatially filtering said one or more beams.

28. A method for characterizing an optical system using a holographic reticle, the method comprising:

receiving two beams of coherent optical radiation;

adjusting a first beam and a second beam to create plane wave beams;

interfering said two beams, resulting in an interference volume of optical radiation having an interference pattern;

recording said interference pattern in a recording medium to create said holographic reticle;

configuring said optical system such that a first plane that includes said holographic reticle is positioned obliquely to a second plane where an image is recorded;

placing said holographic reticle in a path of an optical beam within said optical system; and

recording the image produced by the path of the optical beam passing through said holographic reticle;

wherein the image is configured to characterize said optical system for at least one of field curvature, astigmatism, coma, distortion, telecentricity, spherical aberrations, and variation of coherence.