Method for decomposition of a customized DOE for use with a single exposure into a set of multiple exposures using standard DOEs with optimized exposure settings
First Claim
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1. A method of determining diffractive optical elements to be utilized in an imaging process, said method comprising the steps of:
- defining a customized diffractive optical element which is based on a target pattern to be printed during said imaging process;
decomposing said customized diffractive optical element into one or more standard diffractive optical elements; and
defining an exposure dose to be assigned to each of said one or more standard diffractive optical elements,wherein the one or more standard diffractive optical elements are adapted to adjust characteristics of radiation that projects from an illumination source in the imaging process, and wherein the radiation, after it has been projected from the illumination source, illuminates a mask having features corresponding to the target pattern during the imaging process, so as to print the target pattern on a wafer.
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Abstract
A method of determining diffractive optical elements to be utilized in an imaging process. The method includes the steps of defining a customized diffractive optical element which is based on a target pattern to be printed during the imaging process; decomposing the customized diffractive optical element into one or more standard diffractive optical elements; and defining an exposure dose to be assigned to each of the one or more standard diffractive optical elements.
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Citations
14 Claims
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1. A method of determining diffractive optical elements to be utilized in an imaging process, said method comprising the steps of:
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defining a customized diffractive optical element which is based on a target pattern to be printed during said imaging process; decomposing said customized diffractive optical element into one or more standard diffractive optical elements; and defining an exposure dose to be assigned to each of said one or more standard diffractive optical elements, wherein the one or more standard diffractive optical elements are adapted to adjust characteristics of radiation that projects from an illumination source in the imaging process, and wherein the radiation, after it has been projected from the illumination source, illuminates a mask having features corresponding to the target pattern during the imaging process, so as to print the target pattern on a wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of imaging a mask having a target pattern, said method comprising the steps of:
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defining a set of process parameters to be utilized to image said mask; defining a customized diffractive optical element which is based on said target pattern and said set of process parameters; decomposing said customized diffractive optical element into one or more standard diffractive optical elements; defining an exposure dose to be assigned to each of said one or more standard diffractive optical elements, and utilizing said one or more standard diffractive optical elements to adjust characteristics of radiation projected from an illumination source when imaging said mask, wherein the radiation illuminates the mask after it has been projected from the illumination source. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification