Method for local hot spot fixing
First Claim
1. A method comprising:
- providing an input file in an electronic format in a computer readable medium, wherein the input file comprises a device layout;
fabricating a semiconductor device corresponding to the device layout of the input file;
performing a first hot spot detection, using a first hot spot detection machine, on the input file to detect a hot spot in the device layout of the input file;
performing a second hot spot detection, using a second hot spot detection machine, on the semiconductor device to detect a hot spot in the semiconductor device; and
comparing the hot spots detected by the first and second hot spot detections in order for;
modifying the device layout of the input file based on the first hot spot detection when the hot spot is detected in the device layout to create an output file if the hot spots detected by the first and second hot spot detections are consistent with respect to each other, andcalibrating the first hot spot detection to correspond to the hot spot detected by the second hot spot detection when the hot spots detected by the first and second hot spot detections are inconsistent with respect to each other.
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Abstract
Efficient and cost-effective systems and methods for detecting and correcting hot spots of semiconductor devices are disclosed. In one aspect, a method includes providing an input file having a device layout; performing a hot spot detection on the input file; and then modifying the device layout based on the hot spots detected to create an output file. In another aspect, a method includes providing an input file having a device layout; selecting a first local region of the device layout; performing a first hot spot detection on the first local region; modifying the first local region based on the hot spots detected to create a first output file; and repeating for other local regions of the device layout. In some aspects, hot spots are detected by comparing parameters of the device layout with a set of hot spot rules to determine if the device layout satisfies the hot spot rules.
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Citations
19 Claims
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1. A method comprising:
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providing an input file in an electronic format in a computer readable medium, wherein the input file comprises a device layout; fabricating a semiconductor device corresponding to the device layout of the input file; performing a first hot spot detection, using a first hot spot detection machine, on the input file to detect a hot spot in the device layout of the input file; performing a second hot spot detection, using a second hot spot detection machine, on the semiconductor device to detect a hot spot in the semiconductor device; and comparing the hot spots detected by the first and second hot spot detections in order for; modifying the device layout of the input file based on the first hot spot detection when the hot spot is detected in the device layout to create an output file if the hot spots detected by the first and second hot spot detections are consistent with respect to each other, and calibrating the first hot spot detection to correspond to the hot spot detected by the second hot spot detection when the hot spots detected by the first and second hot spot detections are inconsistent with respect to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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providing an input file in an electronic format in a computer readable medium, wherein the input file comprises a device layout having a plurality of local regions; selecting at least one local region from the plurality of local regions of the device layout until all of the plurality of local regions of the device layout have been selected; performing first hot spot detections, using a first hot spot detection machine, on each one of the local regions based on a plurality of hot spot rules to detect hot spots in each one of the local regions of the device layout, wherein at least one of the hot spot rules corresponds to determining a pattern density of each one of the local regions exceeding a predetermined threshold; modifying each one of the local regions of the device layout based on the first hot spot detected to create an output file; fabricating a semiconductor device corresponding to the output file; performing second hot spot detections, using a second hot spot detection machine, on the semiconductor devices; tuning the first hot spot detection machine and generating a modified output file in response to the second hot spot detections; and fabricating another semiconductor device using the modified output file. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method comprising:
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providing an input file including a device layout; fabricating a test semiconductor device corresponding to the device layout of the input file; comparing by a first hot spot detector at least one parameter of the device layout to at least one of a plurality of hot spot rules to determine if the at least one hot spot rule is violated by the at least one parameter of the device layout; comparing by a second hot spot detector at least one parameter of the test semiconductor device to the at least one of the plurality of hot spot rules to determine if the at least one hot spot rule is violated by the at least one parameter of the test semiconductor device, wherein the at least one parameter of the test semiconductor device is substantially the same as the at least one parameter of the device layout; modifying the device layout of the input file when the at least one parameter of the device layout and the at least one parameter of the test semiconductor device both violate the at least one hot spot rule to avoid violating the at least one hot spot rule, wherein the device layout is modified based upon a plurality of modification guidance parameters that are associated with the plurality of hot spot rules; creating an output file based on the modified device layout; and fabricating a production semiconductor device corresponding to the output file. - View Dependent Claims (19)
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Specification