Silicon micromechanical gyroscope
First Claim
1. A silicon micromechanical gyroscope, comprisinga sensing element, comprising:
- a swinging silicon slice,an elastic twist beam hanging the swinging silicon slice within a packaging chamber, wherein said elastic twist beam allows the swinging silicon slice to swing around the lengthwise axis of the beam within a range of angle in the chamber, anda capacitance sensing element comprising four capacitors formed between the swinging silicon slice and the chamber, wherein the output signal of the capacitors is responsive to the position of the swinging silicon slice; and
a signal processing circuit for analyzing the output signal of the capacitor, comprising;
a signal detecting bridge circuit formed by the capacitance sensing element as bridge arm; and
a SCM signal process circuit with data process module,wherein the capacitance sensing element adopts no driving structure, when the gyroscope is mounted on a rotating body, the output signal of the capacitors can be analyzed to detect a rotation angular velocity and transverse angular velocity of the rotating body simultaneously through the signal processing circuit.
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Abstract
The present invention relates to a novel silicon micromechanical gyroscope, which is used in control technology field to measure pose measurement of a rotating body, such as aerobat, motor tire and drilling platform, wherein the novel silicon micromechanical gyroscope main includes a sensing element and a signal process circuit. The sensing element further comprises a silicon slice frame, a silicon slice, an upper electrode ceramics plate and a bottom electrode ceramics plate. The signal process circuit further comprises a signal detecting bridge circuit used as bridge arm of the capacitor sensing element, and a SCM signal process circuit with data process module. The novel silicon micromechanical gyroscope is able to replace a drive force from the drive conformation with a rotating force from the rotation of the rotating body so as to achieve a novel silicon micromechanical gyroscope without a drive conformation. The novel silicon micromechanical gyroscope without a drive conformation to mostly achieve purposes like minify in craft, simply in structure and reduced in volume so as to effectively lower cost and save energy.
18 Citations
7 Claims
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1. A silicon micromechanical gyroscope, comprising
a sensing element, comprising: -
a swinging silicon slice, an elastic twist beam hanging the swinging silicon slice within a packaging chamber, wherein said elastic twist beam allows the swinging silicon slice to swing around the lengthwise axis of the beam within a range of angle in the chamber, and a capacitance sensing element comprising four capacitors formed between the swinging silicon slice and the chamber, wherein the output signal of the capacitors is responsive to the position of the swinging silicon slice; and a signal processing circuit for analyzing the output signal of the capacitor, comprising; a signal detecting bridge circuit formed by the capacitance sensing element as bridge arm; and a SCM signal process circuit with data process module, wherein the capacitance sensing element adopts no driving structure, when the gyroscope is mounted on a rotating body, the output signal of the capacitors can be analyzed to detect a rotation angular velocity and transverse angular velocity of the rotating body simultaneously through the signal processing circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification