Method of making three dimensional NAND memory
First Claim
1. A monolithic, three dimensional NAND string, comprising a first memory cell located over a second memory cell, wherein:
- a semiconductor active region of the first memory cell comprises a first pillar having a square or rectangular cross section when viewed from above, the first pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions;
a semiconductor active region of the second memory cell comprises a second pillar having a square or rectangular cross section when viewed from above, the second pillar located under the first pillar, the second pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; and
one second conductivity type semiconductor region in the first pillar directly physically contacts one second conductivity type semiconductor region in the second pillar.
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Abstract
A monolithic, three dimensional NAND string includes a first memory cell located over a second memory cell. A semiconductor active region of the first memory cell is a first pillar having a square or rectangular cross section when viewed from above, the first pillar being a first conductivity type semiconductor region located between second conductivity type semiconductor regions. A semiconductor active region of the second memory cell is a second pillar having a square or rectangular cross section when viewed from above, the second pillar located under the first pillar, the second pillar being a first conductivity type semiconductor region located between second conductivity type semiconductor regions. One second conductivity type semiconductor region in the first pillar contacts one second conductivity type semiconductor region in the second pillar.
248 Citations
20 Claims
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1. A monolithic, three dimensional NAND string, comprising a first memory cell located over a second memory cell, wherein:
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a semiconductor active region of the first memory cell comprises a first pillar having a square or rectangular cross section when viewed from above, the first pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; a semiconductor active region of the second memory cell comprises a second pillar having a square or rectangular cross section when viewed from above, the second pillar located under the first pillar, the second pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; and one second conductivity type semiconductor region in the first pillar directly physically contacts one second conductivity type semiconductor region in the second pillar. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A monolithic, three dimensional NAND string, comprising a first memory cell located over a second memory cell, wherein:
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a semiconductor active region of the first memory cell comprises a first pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; a semiconductor active region of the second memory cell comprises a second pillar located under the first pillar, the second pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; one second conductivity type semiconductor region in the first pillar directly physically contacts one second conductivity type semiconductor region in the second pillar; and at least one of the semiconductor active region of the second memory cell or a semiconductor active region of a select transistor is located in a trench in a substrate. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A monolithic, three dimensional NAND string, comprising a first memory cell located over a second memory cell, wherein:
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a semiconductor active region of the first memory cell comprises a first pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; a semiconductor active region of the second memory cell comprises a second pillar located under the first pillar, the second pillar comprising a first conductivity type semiconductor region located between second conductivity type semiconductor regions; one second conductivity type semiconductor region in the first pillar directly physically contacts one second conductivity type semiconductor region in the second pillar; and the first pillar is not aligned with the second pillar, such that the first pillar extends laterally past the second pillar. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification