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Shell type actuator

  • US 7,812,502 B2
  • Filed: 02/20/2006
  • Issued: 10/12/2010
  • Est. Priority Date: 08/20/2003
  • Status: Expired due to Fees
First Claim
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1. A micromechanical resonator comprising:

  • a substrate;

    a partial curved shell clamped on an outside portion of the shell to the substrate, wherein the shell is formed entirely of a non-electro active material compatible with CMOS processes to resonate at RF frequencies or higher responsive to localized time variable heating of only a portion of the shell.

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