Piezo-on-diamond resonators and resonator systems
First Claim
Patent Images
1. An acoustic resonator apparatus, comprising:
- a diamond layer disposed on a substrate;
a piezoelectric layer disposed on the diamond layer; and
top and bottom electrodes sandwiching the piezoelectric layer;
wherein the diamond layer, the piezoelectric layer and the electrodes comprise a stack that is laterally and vertically released from the substrate to form a lateral extensional mode resonator that is free to vibrate relative to the substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
Disclosed are piezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film deposited on a carrier substrate. Exemplary resonators comprise a substrate having a smooth diamond layer disposed thereon. A piezoelectric layer is disposed on the diamond layer and top and bottom electrodes sandwich the piezoelectric layer. The resonant structure comprising the diamond layer, piezoelectric layer and electrodes are released from the substrate and are free to vibrate. Additionally, one or more sensing platforms may be coupled to the substrate to form a mass sensor.
-
Citations
24 Claims
-
1. An acoustic resonator apparatus, comprising:
-
a diamond layer disposed on a substrate; a piezoelectric layer disposed on the diamond layer; and top and bottom electrodes sandwiching the piezoelectric layer; wherein the diamond layer, the piezoelectric layer and the electrodes comprise a stack that is laterally and vertically released from the substrate to form a lateral extensional mode resonator that is free to vibrate relative to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
-
Specification