Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume

• US 7,812,930 B2
• Filed: 03/21/2005
• Issued: 10/12/2010
• Est. Priority Date: 03/21/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: De Jager, Pieter Willem Herman, Hoeks, Martinus Hendricus Hendricus, Van Den Akker, Theodorus Leonardus, Van Hassel, Marco Cornelis Jacobus Martinus, Morselt, Frank Anton, Kessels, Lambertus Gerardus Maria
• Primary Examiner(s): Kim; Peter B
• Assistant Examiner(s): LIU, MICHAEL
• Application Number:
  US11/084,866
• Publication Number:
  US 20060209313A1
• Time in Patent Office: 2,031 Days
• Field of Search: 355/75, 355/53, 355/77, 359/259, 430/5
• US Class Current: 355/77
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus

Abstract

A method and device for programming an array of individually controllable elements configured to impart a beam with a pattern. For example, the method can be suitable for use in a lithographic apparatus. The method includes generating first data representing a first pattern, generating second data representing a second pattern, writing the first data to a first buffer, and reading the first data from the first buffer to program the array of individually controllable elements to display the first pattern, while writing the second data to a second buffer in parallel.

Claims

1. A method, comprising:

dividing a pattern into regions, each of the regions including a sub-pattern, wherein portions of a group of the regions each include a common sub-pattern;

assigning an identifier to each of the sub-patterns;

storing a matrix in a tangible computer data storage medium, each entry of the matrix corresponding to a respective one of the regions and including a respective one of the identifiers that identifies a respective one of the sub-patterns included in the respective one of the regions, wherein the entries of the matrix corresponding to the portions of the group of the regions include a same identifier;

storing only one instance of the common sub-pattern in the storage;

providing a plurality of buffers configured to store at least one of the sub-patterns;

transferring each of the at least one of the sub-patterns from the plurality of buffers to a controller; and

actuating an array of individually controllable elements with the controller in accordance with the at least one of the sub-patterns,

wherein the transferring comprises transferring the at least one portion of the pattern from at least one buffer of the plurality of buffers to a different buffer of the plurality of buffers prior to transferring the at least one portion of the pattern to the controller.

2. The method of claim 1, wherein at least one of the sub-patterns defines a display pixel area.

3. The method of claim 1, further comprising:

storing only one instance of each of the sub-patterns in the storage, regardless of the number of times each of the sub-patterns appears in the pattern.

4. The method of claim 1, wherein each of the sub-patterns comprises a fixed size bitmap.

5. The method of claim 1, wherein a total number of the regions is chosen in accordance with available memory storage space.

6. The method of claim 1, wherein the at least one of the sub-patterns held in the at least one buffer defines a display pixel area.

7. The method of claim 1, further comprising:

forming each of the plurality of buffers with a memory and a data processor, wherein the data processor decompresses data and is coupled to an output of the memory; and

coupling the memory of at least one of the plurality of buffers to an input of a data processor of a different one of the plurality of buffers.

8. A method, comprising:

storing in a tangible computer data storage medium, data representing a pattern used to generate a beam;

dividing the pattern into a plurality of regions;

assigning an identifier corresponding to a portion of the pattern to each of the plurality of regions;

storing in the tangible computer data storage medium, the portion of the pattern corresponding to each unique identifier;

providing a plurality of buffers that store at least one of the portions of the pattern;

transferring each portion of the pattern from the plurality of buffers to a controller;

actuating the array with the controller in accordance with the at least one of the portions of the pattern;

forming each of the plurality of the at least one buffer buffers with a memory and a data processor, wherein the data processor decompresses data and is coupled to an output of the memory; and

coupling the memory of at least one buffer of the plurality of buffers to an input of a data processor of a different one of the plurality of buffers,

wherein the transferring comprises transferring the at least one portion of the pattern from the at least one buffer to the different buffer prior to transferring the at least one portion of the pattern to the controller.

9. The method of claim 8, further comprising:

using a resource schedule to carry out the transfer of data between the at least one buffer and the different buffer.

10. The method of claim 9, wherein the resource schedule is generated based upon the extent of compression of the pattern data.

11. The method of claim 9, wherein the resource schedule is generated offline.

12. The method of claim 9, wherein the resource schedule is generated dynamically while the array is being programmed.

13. An apparatus, comprising:

a divider configured to divide a pattern used to adjust a patterning device into a plurality of regions, each of the regions including a sub-pattern, wherein portions of a group of the regions each include a common sub-pattern;

an assigning device configured to assign an identifier to each of the sub-patterns;

a storage device configured to store;

a matrix, each entry of the matrix corresponding to a respective one of the regions and including a respective identifier that identifies a respective one of the sub-patterns included in the respective region, wherein entries of the matrix corresponding to the portions of the group of regions include a same identifier, and

only one instance of the common sub-pattern;

a plurality of buffers configured to store at least one of the sub-patterns; and

a transferring device configured to transfer each of the at least one of the sub-patterns from the plurality of buffers to a controller, wherein the controller actuates the patterning device in accordance with the at least one of the sub-patterns,

wherein the transferring device is further configured to transfer the at least one portion of the pattern from at least one buffer of the plurality of buffers to a different buffer of the plurality of buffers prior to transferring the at least one portion of the pattern to the controller.

14. The apparatus of claim 13, wherein each of the plurality of buffers is comprised of a memory and a data processor, wherein the data processor decompresses data and is coupled to an output of the memory, and the output of the memory of at least one of the plurality of buffers is coupled to an input of a data processor of a different one of the plurality of buffers.

15. A lithographic apparatus, comprising:

a system configured to generate a beam in accordance with a pattern, wherein the pattern includes regions, wherein each of the regions includes a sub-pattern, and wherein portions of a group of the regions each include a common sub-pattern;

a projection system configured to project the generated beam onto a target portion of a substrate;

a storage device configured to store;

a matrix, each entry of the matrix corresponding to a respective one of the regions and including a respective identifier that identifies a respective one of the sub-patterns included in the respective region, wherein the entries of the matrix corresponding to the portions of the group of regions include a same identifier, and

only one instance of the common sub pattern. sub-pattern;

a plurality of buffers configured to store at least one of the sub-patterns; and

a transferring device configured to transfer each of the at least one of the sub-patterns from the plurality of buffers to a controller, wherein the controller actuates the patterning device in accordance with the at least one of the sub-patterns,

wherein the transferring device is further configured to transfer the at least one portion of the pattern from the at least one buffer to the different buffer prior to transferring the at least one portion of the pattern to the controller.

16. The lithographic apparatus of claim 15, wherein each of the plurality of buffers is comprised of a memory and a data processor, wherein the data processor decompresses data and is coupled to an output of the memory, and the output of the memory of at least one of the plurality of buffers is coupled to an input of a data processor of a different one of the plurality of buffers.