Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume
First Claim
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1. A method, comprising:
- dividing a pattern into regions, each of the regions including a sub-pattern, wherein portions of a group of the regions each include a common sub-pattern;
assigning an identifier to each of the sub-patterns;
storing a matrix in a tangible computer data storage medium, each entry of the matrix corresponding to a respective one of the regions and including a respective one of the identifiers that identifies a respective one of the sub-patterns included in the respective one of the regions, wherein the entries of the matrix corresponding to the portions of the group of the regions include a same identifier;
storing only one instance of the common sub-pattern in the storage;
providing a plurality of buffers configured to store at least one of the sub-patterns;
transferring each of the at least one of the sub-patterns from the plurality of buffers to a controller; and
actuating an array of individually controllable elements with the controller in accordance with the at least one of the sub-patterns,wherein the transferring comprises transferring the at least one portion of the pattern from at least one buffer of the plurality of buffers to a different buffer of the plurality of buffers prior to transferring the at least one portion of the pattern to the controller.
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Abstract
A method and device for programming an array of individually controllable elements configured to impart a beam with a pattern. For example, the method can be suitable for use in a lithographic apparatus. The method includes generating first data representing a first pattern, generating second data representing a second pattern, writing the first data to a first buffer, and reading the first data from the first buffer to program the array of individually controllable elements to display the first pattern, while writing the second data to a second buffer in parallel.
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Citations
16 Claims
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1. A method, comprising:
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dividing a pattern into regions, each of the regions including a sub-pattern, wherein portions of a group of the regions each include a common sub-pattern; assigning an identifier to each of the sub-patterns; storing a matrix in a tangible computer data storage medium, each entry of the matrix corresponding to a respective one of the regions and including a respective one of the identifiers that identifies a respective one of the sub-patterns included in the respective one of the regions, wherein the entries of the matrix corresponding to the portions of the group of the regions include a same identifier; storing only one instance of the common sub-pattern in the storage; providing a plurality of buffers configured to store at least one of the sub-patterns; transferring each of the at least one of the sub-patterns from the plurality of buffers to a controller; and actuating an array of individually controllable elements with the controller in accordance with the at least one of the sub-patterns, wherein the transferring comprises transferring the at least one portion of the pattern from at least one buffer of the plurality of buffers to a different buffer of the plurality of buffers prior to transferring the at least one portion of the pattern to the controller. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method, comprising:
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storing in a tangible computer data storage medium, data representing a pattern used to generate a beam; dividing the pattern into a plurality of regions; assigning an identifier corresponding to a portion of the pattern to each of the plurality of regions; storing in the tangible computer data storage medium, the portion of the pattern corresponding to each unique identifier; providing a plurality of buffers that store at least one of the portions of the pattern; transferring each portion of the pattern from the plurality of buffers to a controller; actuating the array with the controller in accordance with the at least one of the portions of the pattern; forming each of the plurality of the at least one buffer buffers with a memory and a data processor, wherein the data processor decompresses data and is coupled to an output of the memory; and coupling the memory of at least one buffer of the plurality of buffers to an input of a data processor of a different one of the plurality of buffers, wherein the transferring comprises transferring the at least one portion of the pattern from the at least one buffer to the different buffer prior to transferring the at least one portion of the pattern to the controller. - View Dependent Claims (9, 10, 11, 12)
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13. An apparatus, comprising:
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a divider configured to divide a pattern used to adjust a patterning device into a plurality of regions, each of the regions including a sub-pattern, wherein portions of a group of the regions each include a common sub-pattern; an assigning device configured to assign an identifier to each of the sub-patterns; a storage device configured to store; a matrix, each entry of the matrix corresponding to a respective one of the regions and including a respective identifier that identifies a respective one of the sub-patterns included in the respective region, wherein entries of the matrix corresponding to the portions of the group of regions include a same identifier, and only one instance of the common sub-pattern; a plurality of buffers configured to store at least one of the sub-patterns; and a transferring device configured to transfer each of the at least one of the sub-patterns from the plurality of buffers to a controller, wherein the controller actuates the patterning device in accordance with the at least one of the sub-patterns, wherein the transferring device is further configured to transfer the at least one portion of the pattern from at least one buffer of the plurality of buffers to a different buffer of the plurality of buffers prior to transferring the at least one portion of the pattern to the controller. - View Dependent Claims (14)
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15. A lithographic apparatus, comprising:
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a system configured to generate a beam in accordance with a pattern, wherein the pattern includes regions, wherein each of the regions includes a sub-pattern, and wherein portions of a group of the regions each include a common sub-pattern; a projection system configured to project the generated beam onto a target portion of a substrate; a storage device configured to store; a matrix, each entry of the matrix corresponding to a respective one of the regions and including a respective identifier that identifies a respective one of the sub-patterns included in the respective region, wherein the entries of the matrix corresponding to the portions of the group of regions include a same identifier, and only one instance of the common sub pattern. sub-pattern; a plurality of buffers configured to store at least one of the sub-patterns; and a transferring device configured to transfer each of the at least one of the sub-patterns from the plurality of buffers to a controller, wherein the controller actuates the patterning device in accordance with the at least one of the sub-patterns, wherein the transferring device is further configured to transfer the at least one portion of the pattern from the at least one buffer to the different buffer prior to transferring the at least one portion of the pattern to the controller. - View Dependent Claims (16)
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Specification