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Micromachined sensors

  • US 7,814,794 B2
  • Filed: 09/07/2007
  • Issued: 10/19/2010
  • Est. Priority Date: 09/07/2007
  • Status: Expired due to Fees
First Claim
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1. A micromachined sensor, comprising:

  • a substrate;

    a proof mass movable with respect to the substrate, the proof mass having a first portion, a second portion separated from the first portion and a third portion connecting the first portion to the second portion;

    a frame positioned on the substrate and enclosing the proof mass;

    a plurality of springs connecting the proof mass to the frame;

    a plurality of first electrodes extending from the frame;

    a plurality of second electrodes extending from the frame;

    a plurality of third electrodes extending from the first portion of the proof mass and interleaved with the first electrodes;

    a plurality of fourth electrodes extending from the second portion of the proof mass and interleaved with the second electrodes;

    a first support beam extending from the frame to the area between the first and second portions of the proof mass;

    a plurality of seventh electrodes extending from the first support beam;

    a plurality of eighth electrodes extending from the first support beam;

    a plurality of fifth electrodes extending from the first portion of the proof mass and interleaved with the seventh electrodes; and

    a plurality of sixth electrodes extending from the second portion of the proof mass and interleaved with the eighth electrodes.

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