Micromachined sensors
First Claim
1. A micromachined sensor, comprising:
- a substrate;
a proof mass movable with respect to the substrate, the proof mass having a first portion, a second portion separated from the first portion and a third portion connecting the first portion to the second portion;
a frame positioned on the substrate and enclosing the proof mass;
a plurality of springs connecting the proof mass to the frame;
a plurality of first electrodes extending from the frame;
a plurality of second electrodes extending from the frame;
a plurality of third electrodes extending from the first portion of the proof mass and interleaved with the first electrodes;
a plurality of fourth electrodes extending from the second portion of the proof mass and interleaved with the second electrodes;
a first support beam extending from the frame to the area between the first and second portions of the proof mass;
a plurality of seventh electrodes extending from the first support beam;
a plurality of eighth electrodes extending from the first support beam;
a plurality of fifth electrodes extending from the first portion of the proof mass and interleaved with the seventh electrodes; and
a plurality of sixth electrodes extending from the second portion of the proof mass and interleaved with the eighth electrodes.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention provides a micromachined sensor. The micromachined sensor includes a proof mass movable with respect to a substrate. The proof mass includes a first portion, a second portion separated from the first portion and a third portion connecting the first portion to the second portion. A frame is positioned on the substrate and encloses the proof mass. A plurality of springs connects the proof mass to the frame. A plurality of first and second electrodes extends from the frame. A plurality of third electrodes extends from the first portion of the proof mass and is interleaved with the first electrodes. A plurality of fourth electrodes extends from the second portion of the proof mass and is interleaved with the second electrodes. A first support beam extends from the frame to the area between the first and second portions of the proof mass. A plurality of seventh and eighth electrodes extends from the first support beam. A plurality of fifth electrodes extends from the first portion of the proof mass and is interleaved with the seventh electrodes. A plurality of sixth electrodes extends from the second portion of the proof mass and is interleaved with the eighth electrodes.
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Citations
14 Claims
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1. A micromachined sensor, comprising:
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a substrate; a proof mass movable with respect to the substrate, the proof mass having a first portion, a second portion separated from the first portion and a third portion connecting the first portion to the second portion; a frame positioned on the substrate and enclosing the proof mass; a plurality of springs connecting the proof mass to the frame; a plurality of first electrodes extending from the frame; a plurality of second electrodes extending from the frame; a plurality of third electrodes extending from the first portion of the proof mass and interleaved with the first electrodes; a plurality of fourth electrodes extending from the second portion of the proof mass and interleaved with the second electrodes; a first support beam extending from the frame to the area between the first and second portions of the proof mass; a plurality of seventh electrodes extending from the first support beam; a plurality of eighth electrodes extending from the first support beam; a plurality of fifth electrodes extending from the first portion of the proof mass and interleaved with the seventh electrodes; and a plurality of sixth electrodes extending from the second portion of the proof mass and interleaved with the eighth electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micromachined sensor, comprising:
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a substrate; a proof mass movable with respect to the substrate, the proof mass having a first portion, a second portion, a third portion separated from the first and second portions, a fourth portion connecting the first portion to the third portion and a fifth portion connecting the second portion to the third portion; a frame positioned on the substrate and enclosing the proof mass; a plurality of springs connecting the proof mass to the frame; a plurality of first electrodes extending from the frame; a plurality of twelfth electrodes extending from the frame; a plurality of second electrodes extending from the first portion of the proof mass and interleaved with the first electrodes; a plurality of eleventh electrodes extending from the second portion of the proof mass and interleaved with the twelfth electrodes; a plurality of third electrodes extending from the first portion of the proof mass; a plurality of tenth electrodes extending from the second portion of the proof mass; a plurality of sixth electrodes extending from the third portion of the proof mass; a plurality of seventh electrodes extending from the third portion of the proof mass; a first support beam extending from the frame to the area between the first and third portions of the proof mass; a second support beam extending from the frame to the area between the second and third portions of the proof mass; a plurality of fourth electrodes extending from the first support beam and interleaved with the third electrodes; a plurality of fifth electrodes extending from the first support beam and interleaved with the sixth electrodes; a plurality of eighth electrodes extending from the second support beam and interleaved with the seventh electrodes; and a plurality of ninth electrodes extending from the second support beam and interleaved with the tenth electrodes. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification