Partial pressure measuring method and partial pressure measuring apparatus
First Claim
1. A partial pressure measuring method comprising:
- moving a local plasma source to a location at which partial pressure is to be measured, the local plasma source being provided in a vacuum chamber and dedicated to the partial pressure measuring; and
measuring a partial pressure distribution in the vacuum chamber, by (i) receiving, through a window, emission of plasma generated by the local plasma source and (ii) performing emission spectral analysis on intensity of the emission, the window being provided in a wall part of the vacuum chamber and through the window the emission passing.
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Accused Products
Abstract
Provided is a partial pressure measuring method and a partial pressure measuring apparatus by which a partial pressure distribution is easily measured in a vacuum chamber. The partial pressure measuring method and the partial pressure measuring apparatus includes: moving a local plasma source dedicated to partial pressure measuring provided in the vacuum chamber, to a location at which the measuring is to be performed; and measuring a partial pressure distribution in the vacuum chamber, by receiving emission of plasma generated by the local plasma source through a window which is formed in a wall part of the vacuum chamber and through which the emission passes, and thereby performing emission spectral analysis on intensity of the emission.
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Citations
16 Claims
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1. A partial pressure measuring method comprising:
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moving a local plasma source to a location at which partial pressure is to be measured, the local plasma source being provided in a vacuum chamber and dedicated to the partial pressure measuring; and measuring a partial pressure distribution in the vacuum chamber, by (i) receiving, through a window, emission of plasma generated by the local plasma source and (ii) performing emission spectral analysis on intensity of the emission, the window being provided in a wall part of the vacuum chamber and through the window the emission passing. - View Dependent Claims (2, 3, 4, 5)
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6. A partial pressure measuring method comprising
measuring a partial pressure distribution at plurality of locations in a vacuum chamber, by (i) receiving, through a window, emission of plasma generated by each of a plurality of local plasma sources in the vacuum chamber and (ii) performing emission spectral analysis on intensity of the emission regarding each of said plurality of local plasma sources, the window being provided in a wall part of the vacuum chamber and through the window the emission passing.
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9. A partial pressure measuring apparatus comprising:
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a local plasma source which is provided in a vacuum chamber and dedicated to partial pressure measuring; a moving unit operable to move the local plasma source to a location at which the partial pressure is to be measured; a window which is formed in a wall part of the vacuum chamber and through which the emission passes; and a measurement unit operable to measure a partial pressure distribution in the vacuum chamber, by (i) receiving, through the window, emission of plasma generated by the local plasma source and (ii) performing emission spectral analysis on intensity of the emission. - View Dependent Claims (10, 11, 12, 13)
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14. A partial pressure measuring apparatus comprising:
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a plurality of local plasma sources which are provided in a vacuum chamber and dedicated to partial pressure measuring; a window which is formed in a wall part of the vacuum chamber and through which the emission passes; and a measurement unit operable to measure a partial pressure distribution in the vacuum chamber, by (i) receiving, through the window, emission of plasma generated by each of the plurality of local plasma sources and (ii) performing emission spectral analysis on intensity of the emission regarding each of said plurality of local plasma sources. - View Dependent Claims (15, 16)
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Specification