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MEMS processing

  • US 7,816,164 B2
  • Filed: 12/01/2006
  • Issued: 10/19/2010
  • Est. Priority Date: 12/01/2006
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing a microelectromechanical (MEMS) display device, comprising:

  • providing a transparent substrate having an array of MEMS devices formed thereon;

    identifying at least one MEMS device in the array of MEMS devices exhibiting a desiccant pattern, wherein the desiccant pattern is identified by a time delay between the at least one MEMS device and the remaining MEMS devices within the array when the array of MEMS devices transition from an actuated state to a relaxed state, and if the time delay is between about 1 μ

    s to about 20 μ

    s, baking the at least one MEMS device under predetermined conditions to remove contaminants from the at least one MEMS device, wherein the predetermined conditions comprise a baking time and a baking temperature, and wherein said baking time is between about 10 minutes and about 3 hours; and

    sealing said transparent substrate to a backplate to form a package, wherein the backplate comprises a desiccant.

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