Vibration isolation system

• US 7,817,243 B2
• Filed: 04/12/2004
• Issued: 10/19/2010
• Est. Priority Date: 04/12/2004
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Van Der Toorn, Jan-Gerard Cornelis, Heertjes, Marcel Francois
• Primary Examiner(s): Wood; Kimberly T
• Application Number:
  US10/822,139
• Publication Number:
  US 20050224687A1
• Time in Patent Office: 2,381 Days
• Field of Search: 267/140.14, 267/140.15, 267/137, 267/378, 267/379, 267/380, 248/638, 248/550, 248/562, 248/559, 355/53, 355/67, 188/378, 188/379, 188/380, 318/649, 318/489, 318/460, 318/638, 318/648
• US Class Current: 355/53
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

A vibration isolation system isolates a body from its surroundings with respect to vibrations. The vibration isolation system includes active isolator devices that isolate and damp the body in unstable directions. However, such active isolators may exert damping forces not only in the unstable direction, but simultaneously in other stable directions due to mechanical coupling of the stable and unstable directions. As a result the damping and isolation in the other stable directions may be deteriorated due to the active isolation and damping. Employing modal decoupling, i.e. decomposing any vibration into independent directions, and isolating and damping in the independent directions, enables compensation of any vibration in an unstable direction without influencing the isolation and damping performance in any other, possibly stable, direction.

Claims

1. A vibration isolation system for at least partially damping and isolating vibrations of a body, the system comprising:

a plurality of sensors mechanically coupled to the body configured to detect vibrations of the body;

a plurality of active isolator devices mechanically coupled to the body; and

a control system coupled to the active isolator devices that;

(a) correlates vibrations measured in a first coordinate system with vibrations in modal directions based on natural modes or eigenmodes of the body,

wherein the natural modes or eigenmodes of the body depend on physical characteristics of the body and the body'"'"'s coupling to an environment, and are defined by the directions in which the body naturally vibrates;

(b) transforms vibrations measured in a first coordinate system of the plurality of sensors into vibrations in modal directions, that comprise a second coordinate system, corresponding to the natural modes or eigenmodes of the body;

(c) determines a modal compensation signal for each modal direction;

(d) transforms each modal compensation signal into an active isolator control signal in the first coordinate system for each active isolator device; and

(e) stabilizes at least one unstable natural mode of the body.

2. The system of claim 1, wherein the at least one unstable natural mode stabilized by the control system is directed substantially vertically.

3. The system of claim 1, wherein the body is positioned on a base frame by air mounts.

4. The system of claim 1, wherein a passive isolator device and an active isolator device engage the body at the same location on the body.