MEMS device with an angular vertical comb actuator

• US 7,817,331 B2
• Filed: 03/06/2008
• Issued: 10/19/2010
• Est. Priority Date: 06/21/2007
• Status: Active Grant

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: JDS Uniphase Corporation (Lumentum Holdings Inc.)
• Inventors: Moidu, Abdul Jaleel. K.
• Primary Examiner(s): Ben; Loha
• Application Number:
  US12/043,202
• Publication Number:
  US 20080316577A1
• Time in Patent Office: 957 Days
• Field of Search: 359290-295, 359/298, 359/224.1, 359/225.1, 359/226.1, 735/040.2, 735/041.2, 735/041.6, 735/042.9, 737/78, 216/2, 216/11, 216/13, 216/24, 216/66, 216/88, 310/90, 310/309, 438/22, 438/48, 438 51- 53, 298/30, 298/46, 298/47, 298/51
• US Class Current: 359/291
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 3/004 Angular deflection

Abstract

A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

Claims

1. A MEMs micro-mirror device comprising:

a substrate;

a mirrored platform pivotally mounted above the substrate for rotation about a first axis;

a first hinge enabling the mirrored platform to rotate about the first axis;

a stator comb actuator extending from the substrate; and

a rotor comb actuator, for interleaving with the stator comb actuator, extending at an acute angle from the mirrored platform for rotating the mirrored platform about the first axis.

2. The device according to claim 1, wherein the rotor comb actuator includes a fixed end, and an outer end;

and

wherein the fixed end of the rotor comb actuator is coplanar with the stator comb actuator,

whereby the rotor and stator comb actuators are formable in the same layer.

3. The device according to claim 1, wherein the rotor comb actuator includes a first cantilevered structure and first rotor combs extending therefrom;

wherein the first cantilevered structure includes a prestressed layer for bending the first cantilevered structure and the rotor comb actuator at the acute angle to the stator comb actuator.

4. The device according to claim 3, wherein the first cantilevered structure includes a fixed inner end, and the first rotor combs include outer free ends;

and

wherein the fixed inner end of the first cantilevered structure is coplanar with the stator comb actuator, whereby the rotor and stator comb actuators are formable in the same layer.

5. The device according to claim 4, further comprising a frame extending between the rotor comb actuator and the platform, whereby when the first cantilevered structure bends the rotor comb actuator, the platform is disposed above the first hinge and the stator comb actuator.

6. The device according to claim 4, wherein the first cantilevered structure bends relative to the platform, whereby when the first cantilevered structure bends the rotor comb actuator, the platform remains coplanar with the stator comb actuator.

7. The device according to claim 1, further comprising an anchor post extending upwardly from the substrate through an opening in the platform along the first axis;

wherein the first hinge includes first and second torsional beams extending between the platform and the anchor post.

8. The device according to claim 7, wherein the platform is wider than the first hinge, whereby a plurality of platforms can be closely packed together.

9. The device according to claim 7, further comprising:

an internal frame structure surrounding the anchor post and the first hinge;

a second hinge including third and fourth torsional beams extending from opposite ends of the internal frame structure to opposite sides of the platform, respectively, defining a second axis; and

an electrode actuator for rotating the platform about the second axis;

whereby the platform rotates relative to the internal frame structure about the second axis when the electrode actuator is actuated.

10. The device according to claim 9, wherein the electrode actuator comprises an electrostatic electrode mounted on the substrate for attracting a section of an underside of the platform.

11. A method of fabricating a micro-mirror device including a platform pivotable about a first hinge by a vertical comb drive including first and second stator combs fixed relative to a substrate and first and second rotor combs extending at an acute angle to the substrate from prestressed first and second cantilevered sections, comprising the steps of:

a) providing a double silicon on insulator structure including first and second structural layers, and first and second insulator layers;

b) etching the first and second insulator layers, and the second structural layer to form the first and second cantilevered sections on the first structural layer, the second insulator layer forming a prestressed layer for each of the first and second cantilevered sections;

c) mounting the first structural layer on first, second and third supports extending from the substrate;

d) etching the first structural layer to form the first hinge extending from the first support, the first and second rotor combs extending from the first and second cantilevered sections, respectively, the first and second stator combs extending from the second and third supports, and the platform; and

e) etching the first structural layer above the first and second cantilevered sections, thereby releasing the first and second cantilevered sections enabling the first and second cantilevered sections to bend at the acute angle relative to the substrate due to the prestressed layers.

12. The method according to claim 11, wherein forming the platform in step d) includes etching an internal frame structure pivotable about a first axis via the first hinge, and etching an external deck pivotable with the internal frame structure about the first axis.

13. The method according to claim 12, wherein forming the internal frame structure in step d) includes etching first and second skeletal frames extending from the first and second cantilevered sections, respectively, around the first and second rotor combs, respectively;

whereby bending of the cantilevered sections results in the first and second skeletal frames to bend therewith, thereby lifting the external deck relative to the internal frame structure.

14. The method according to claim 12, wherein forming the internal frame structure in step d) includes etching first and second skeletal frames extending therefrom, around the first and second rotor combs, respectively, separate from the cantilevered sections, whereby bending of the cantilevered sections results in the first and second rotor combs to bend therewith separate from the first and second skeletal frames, thereby lifting the first and second rotor combs at an acute angle relative to the internal frame structure and the first and second skeletal frames.

15. The method according to claim 12, wherein step d) also includes etching a second hinge in the first structural layer including first and second torsional beams extending from opposite ends of the internal frame structure to opposite sides of the external deck, respectively;

and providing an electrode actuator for rotating the external deck about the second hinge;

whereby the external deck rotates relative to the internal frame structure about a the second axis when the electrode actuator is actuated.

16. A method of fabricating a micro-mirror device including a platform pivotable about a first hinge by a vertical comb drive including first and second stator combs fixed relative to a substrate and first and second rotor combs extending at an acute angle to the substrate from first and second prestressed cantilevered sections, respectively, comprising the steps of:

a) providing a silicon on insulator structure including a first structural layer, and first and second insulator layers;

b) etching the first insulator layer to define a prestressed layer for each of the first and second cantilevered sections on the first structural layer;

c) mounting the first structural layer on first, second and third supports extending from the substrate;

d) etching the first structural layer to form the first hinge extending from the first support, the first and second rotor combs extending from the first and second cantilevered sections, respectively, the first and second stator combs extending from the second and third supports, and the platform; and

e) etching the first structural layer above the first and second cantilevered sections, thereby releasing the first and second cantilevered sections enabling them to bend at the acute angle due to the prestressed layers.

17. The method according to claim 16, wherein forming the platform in step d) includes etching an internal frame structure pivotable about a first axis via the first hinge, and an external deck pivotable with the internal frame about the first axis.

18. The method according to claim 17, wherein forming the internal frame structure in step d) includes etching first and second skeletal frames extending from the first and second cantilevered sections, respectively, around the first and second rotor combs, respectively;

whereby bending of the cantilevered sections results in the first and second skeletal frames to bend therewith, thereby lifting the external deck relative to the internal frame structure.

19. The method according to claim 17, wherein forming the internal frame structure in step d) includes etching first and second skeletal frames extending therefrom, around the first and second rotor combs, respectively, separate from the cantilevered sections, whereby bending of the cantilevered sections results in the first and second rotor combs to bend therewith separate from the first and second skeletal frames, thereby lifting the first and second rotor combs at an acute angle relative to the internal frame structure and the first and second skeletal frames.

20. The method according to claim 17, wherein step d) also includes etching a second hinge in the first structural layer including first and second torsional beams extending from opposite ends of the internal frame structure to opposite sides of the external deck, respectively;

and providing an electrode actuator for rotating the external deck about the second hinge;

whereby the external deck rotates relative to the internal frame structure about a second axis when the electrode actuator is actuated.