Modulator with improved sensitivity and life time

• US 7,817,333 B2
• Filed: 02/06/2007
• Issued: 10/19/2010
• Est. Priority Date: 02/06/2007
• Status: Active Grant

• Current Assignee: Orbotech Limited (KLA Corporation)
• Original Assignee: Photon Dynamics Incorporated (KLA Corporation)
• Inventors: Chen, Xianhai
• Primary Examiner(s): WU, SHEAN CHIU
• Application Number:
  US11/671,954
• Publication Number:
  US 20080186563A1
• Time in Patent Office: 1,351 Days
• Field of Search: 428/1.1, 428/1.5, 349/86, 349/199, 349/30, 359/321, 324/770, 252/299.01, 252/299.5
• US Class Current: 359/321
• CPC Class Codes: C09K 19/544 as dispersing or encapsulating medium around the liquid crystal
• CPC Class Codes: C09K 2323/00 Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
• CPC Class Codes: C09K 2323/05 Bonding or intermediate layer characterised by chemical composition, e.g. sealant or spacer
• CPC Class Codes: G02F 1/1334 based on polymer dispersed liquid crystals, e.g. microencapsulated liquid crystals

Abstract

An electro-optic modulator assembly includes a sensor layer made from an electro-optic modulator material that comprises liquid crystal droplets encapsulated within a polymer matrix. The sensor layer material comprises an interfacial agent, for example a defoaming agent, in an amount sufficient to lower an intrinsic operating voltage at which the sensor layer transmits light. The defoaming agent can comprise from about 1 to about 10 percent by weight of the electro-optic modulator material, and the defoaming agent may comprise a reactive component to react with the polymer matrix, for example at least one of a siloxane with a reactive end group, a reactive fluorinated polymer or a non-ionic block copolymer to react with the polymer matrix. The assembly can also include a hard coating layer to protect the sensor layer.

Claims

1. An NCAP latex-based modulator with a protective coating, said modulator comprising:

an NCAP latex based material comprising an interfacial agent;

a dielectric mirror pellicle laminated on top of the NCAP material; and

a cured UV curable organic hard coating on the mirror pellicle.

2. The modulator of claim 1 wherein the interfacial agent comprises a defoaming agent.

3. The modulator of claim 2 wherein an amount of the defoaming agent is sufficient to decrease an operating voltage of the modulator.

4. The modulator of claim 2 wherein the defoaming agent comprises a siloxane with a reactive end group in an amount sufficient to decrease an operating voltage of the modulator.

5. The modulator of claim 2 wherein the defoaming agent comprises a reactive fluorinated polymer present in an amount sufficient to decrease an operating voltage of the modulator.

6. The modulator of claim 2 wherein the defoaming agent comprises a non-ionic block copolymer present in an amount sufficient to decrease an operating voltage of the modulator.

7. The modulator of claim 1 wherein the UV curable organic coating comprises a mixture of multi-functional acrylates, silicone acrylate as a slip agent, a (meth)acrylate terminated toughener, nano sized silica as an inorganic filler, and photo-initiators.