Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool
First Claim
1. A method of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, comprising the steps of:
- projecting radiation through a mask using the lithography tool to generate the image containing short-range flare;
measuring the short-range flare from the image to obtain measured short-range flare data;
generating a simulated image corresponding to the image generated by the lithography tool using short-range flare model parameters to obtain simulated short-range flare data;
comparing the simulated short-range flare data with the measured short range flare data;
determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and
changing the values of the short-range flare model parameters used for generating the simulated image according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
2 Assignments
0 Petitions
Accused Products
Abstract
A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
13 Citations
16 Claims
-
1. A method of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, comprising the steps of:
-
projecting radiation through a mask using the lithography tool to generate the image containing short-range flare; measuring the short-range flare from the image to obtain measured short-range flare data; generating a simulated image corresponding to the image generated by the lithography tool using short-range flare model parameters to obtain simulated short-range flare data; comparing the simulated short-range flare data with the measured short range flare data; determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and changing the values of the short-range flare model parameters used for generating the simulated image according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A computer program product comprising a computer readable storage medium bearing a computer program for obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, the computer program, when executed, causing a computer to perform the steps of:
-
receiving data corresponding to the image containing short-range flare which has been generated by projecting radiation through a mask using the lithography tool; receiving measured short-range flare data that has been obtained by measuring the short-range flare in the image; generating a simulated image corresponding to the image generated by the lithography tool using short-range flare model parameters to obtain simulated short-range flare data; comparing the simulated short-range flare data with the measured short range flare data; determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and changing the values of the short-range flare model parameters used for generating the simulated image according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate. - View Dependent Claims (10, 11, 12)
-
-
13. An apparatus for obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, the apparatus comprising:
-
a first unit configured for measuring short-range flare from the image to obtain measured short-range flare data, wherein the image containing the short-range flare is generated by projecting radiation through a mask using the lithography tool; a second unit configured for generating a simulated image corresponding to the image generated by the lithography tool using short-range flare model parameters to obtain simulated short-range flare data; a third unit configured for comparing the simulated short-range flare data with the measured short range flare data; a fourth unit configured for determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and a fifth unit configured for changing the values of the short-range flare model parameters used for generating the simulated image according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate. - View Dependent Claims (14, 15, 16)
-
Specification