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Disc resonator gyroscope fabrication process requiring no bonding alignment

  • US 7,818,871 B2
  • Filed: 07/25/2007
  • Issued: 10/26/2010
  • Est. Priority Date: 07/25/2006
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a resonant vibratory sensor, comprising the steps of:

  • providing a fabricated baseplate wafer having present thereon at least one locating mark;

    observing a location of said at least one locating mark;

    bonding to said fabricated baseplate wafer a blank resonator wafer;

    affixing to said otherwise blank resonator wafer at least one locating mark at a location defined relative to said at least one locating mark that was observed on said fabricated baseplate; and

    fabricating the resonator structure in said blank resonator wafer in relation to said at least one locating mark affixed to said blank resonator wafer;

    thereby fabricating a resonant vibratory sensor.

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