Sensor and transducer devices comprising carbon nanotubes, methods of making and using the same

• US 7,819,005 B2
• Filed: 06/25/2007
• Issued: 10/26/2010
• Est. Priority Date: 06/25/2007
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Rueger, Neal R.
• Primary Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US11/767,962
• Publication Number:
  US 20080314149A1
• Time in Patent Office: 1,219 Days
• Field of Search: 735/79, 735/97, 736/49, 324/658, 324/649, 977/725, 310/321, 310/36, 310/37, 310/323.06, 423/447.3
• US Class Current: 73/579
• CPC Class Codes: G01H 11/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
• CPC Class Codes: H03H 3/0077 by tuning of resonance frequency

Abstract

Devices usable as sensors, as transducers, or as both sensors and transducers include one or more nanotubes or nanowires. In some embodiments, the devices may each include a plurality of sensor/transducer devices carried by a common substrate. The sensor/transducer devices may be individually operable, and may exhibit a plurality of resonant frequencies to enhance the operable frequency bandwidth of the devices. Sensor/transducer devices include one or more elements configured to alter a resonant frequency of a nanotube. Such elements may be selectively and individually actuable. Methods for sensing mechanical displacements and vibrations include monitoring an electrical characteristic of a nanotube. Methods for generating mechanical displacements and vibrations include using an electrical signal to induce mechanical displacements or vibrations in one or more nanotubes. Methods for adjusting an electrical signal include passing an electrical signal through a nanotube and changing a resonant frequency of the nanotube.

Claims

1. A sensor/transducer device, comprising:

at least one nanotube having a first end structurally and electrically coupled to a first electrode and a second end structurally and electrically coupled to a second electrode; and

at least one element configured to selectively adjust a resonant frequency of the at least one nanotube;

wherein the at least one element comprises at least one piezoelectric element.

2. The device of claim 1, wherein the at least one nanotube comprises a plurality of nanotubes, each nanotube of the plurality of nanotubes having a first end structurally and electrically coupled to a respective first electrode of a plurality of first electrodes and a second end structurally and electrically coupled to a respective second electrode of a plurality of second electrodes.

3. The device of claim 2, wherein at least one nanotube of the plurality of nanotubes is oriented substantially parallel to a first direction, and at least one nanotube of the plurality of nanotubes is oriented substantially parallel to a second direction oriented at an angle to the first direction.

4. The device of claim 3, wherein each of the nanotubes of the plurality of nanotubes is disposed at a selected location on the surface of a substrate.

5. The device of claim 2, wherein the nanotubes of the plurality of nanotubes exhibit a plurality of different resonant frequencies.

6. The device of claim 5, wherein the nanotubes of the plurality of nanotubes have varying lengths.

7. The device of claim 1, wherein the at least one piezoelectric element comprises a piezoelectric material disposed between a pair of electrodes, the at least one piezoelectric element oriented and configured to impinge on the at least one nanotube when a voltage is applied between the pair of electrodes.

8. The device of claim 1, wherein the at least one piezoelectric element comprises a plurality of piezoelectric elements, each piezoelectric element of the plurality of piezoelectric elements configured to impinge on the at least one nanotube at a different location along a length of the at least one nanotube.

9. The device of claim 1, wherein the at least one nanotube comprises a carbon nanotube having one or more walls.

10. A sensor/transducer device comprising a plurality of nanotubes configured to exhibit a plurality of resonant frequencies, each nanotube of the plurality of nanotubes having at least a first end structurally and electrically coupled to an electrode, wherein at least some of the nanotubes of the plurality of nanotubes have a first selected length, at least some of the nanotubes of the plurality of nanotubes have a second selected length differing from the first selected length, at least some of the nanotubes of the plurality of nanotubes are oriented substantially parallel to a first direction, and at least some of the nanotubes of the plurality of nanotubes are oriented substantially parallel to a second direction oriented at an angle relative to the first direction.

11. The device of claim 10, wherein each nanotube of the plurality of nanotubes has a second end structurally and electrically coupled to another electrode.

12. The device of claim 11, further comprising additional electrodes, each positioned proximate an intermediate section of a corresponding nanotube of the plurality of nanotubes, each of the additional electrodes configured to affect or sense a capacitance between each of the additional electrodes and the corresponding nanotubes.

13. The device of claim 10, further comprising additional electrodes, each positioned proximate a second end of a corresponding nanotube of the plurality of nanotubes, each of the additional electrodes configured to affect or sense a capacitance between each of the additional electrodes and the corresponding nanotubes.

14. The device of claim 10, further comprising a plurality of piezoelectric elements, each configured to selectively adjust a resonant frequency of at least one nanotube of the plurality of nanotubes.

15. A method of sensing mechanical movement in a medium, the method comprising selectively adjusting a resonant frequency of at least one nanotube in the medium while measuring at least one electronic characteristic of the at least one nanotube, wherein selectively adjusting a resonant frequency of the at least one nanotube comprises causing at least one piezoelectric element to impinge on at least a portion of the at least one nanotube.

16. The method of claim 15, wherein measuring at least one electronic characteristic of the at least one nanotube comprises measuring a current passing through the at least one nanotube.

17. The method of claim 15, wherein measuring at least one electronic characteristic of the at least one nanotube comprises measuring a capacitance between the at least one nanotube and an electrode located proximate the at least one nanotube.

18. The method of claim 15, wherein causing at least one piezoelectric element to impinge on at least a portion of the at least one nanotube comprises pinching the at least one nanotube between the at least one piezoelectric element and a support block.

19. The method of claim 15, wherein selectively adjusting a resonant frequency of the at least one nanotube comprises generating a tensile or compressive stress in at least a portion of the at least one nanotube.

20. A method of sensing mechanical movement in a medium, comprising:

measuring at least one electronic characteristic of each of a plurality of nanotubes disposed in the medium and having different resonant frequencies; and

determining at least one of a previously unknown direction and a previously unknown velocity of at least one mechanical wave passing through the medium.

21. The method of claim 20, wherein measuring at least one electronic characteristic of each of the plurality of nanotubes comprises measuring a current passing through each of the plurality of nanotubes.

22. The method of claim 20, wherein measuring at least one electronic characteristic of each of a plurality of nanotubes disposed in the medium comprises measuring at least one electronic characteristic of each of a plurality of nanotubes disposed in the medium and oriented in a plurality of directions.

23. A device comprising:

a substrate;

at least one nanotube carried by the substrate;

at least one electrode in electrical contact with the at least one nanotube; and

at least one selectively actuable structure carried by the substrate and configured to abut against a lateral side surface of the at least one nanotube in an actuated position and to be separated from the at least one nanotube in a non-actuated position.

24. The device of claim 23, wherein the at least one selectively actuable structure comprises at least one piezoelectric element.

25. The device of claim 24, wherein the at least one piezoelectric element is configured to abut against the at least one nanotube at an intermediate location along a length of the at least one nanotube.

26. The device of claim 25, wherein the at least one piezoelectric element comprises a plurality of piezoelectric elements each configured to abut against the at least one nanotube at a different location along the length of the at least one nanotube.

27. A method of encoding comprising:

applying a voltage to a nanotube; and

adjusting a resonant frequency of the nanotube using at least one piezoelectric device configured to apply a mechanical force to the nanotube.

28. The method of claim 27, further comprising inducing vibrations in the nanotube.

29. The method of claim 28, wherein applying a voltage to the nanotube comprises passing current though the nanotube.

30. The method of claim 28, wherein applying a voltage to the nanotube comprises affecting a capacitance between the nanotube and an electrode.