Wafer container with cushion sheet

• US 7,819,252 B2
• Filed: 07/08/2009
• Issued: 10/26/2010
• Est. Priority Date: 01/24/2007
• Status: Expired due to Fees

• Current Assignee: Miraial Company Limited
• Original Assignee: Miraial Company Limited
• Inventors: Kasama, Nobuyuki
• Primary Examiner(s): PICKETT, JOHN G
• Application Number:
  US12/499,520
• Publication Number:
  US 20090266740A1
• Time in Patent Office: 475 Days
• Field of Search: 206/710, 206/454, 206/455, 206/503, 206/509, 206/303, 206/445, 206/449, 206/832, 206/308.1, 206/307, 206/309, 206/499, 206/516, 211/41.18, 220/23.6
• US Class Current: 206/710
• CPC Class Codes: H01L 21/67346 characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
• CPC Class Codes: H01L 21/67369 characterised by shock absorbing elements, e.g. retainers or cushions
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Abstract

A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat state and enables the semiconductor wafer to be removed safely and easily without damage. The surface of each wafer-mounting cushion sheet includes a self-sucking portion for exerting a removable vacuum on the semiconductor wafer and a non-sucking portion for enabling separation of the semiconductor wafer.

Claims

1. A wafer container with a wafer mounting sheet comprising:

a plurality of stacked wafer mounting trays that form interior spaces between adjacent wafer mounting trays; and

an elastic wafer mounting cushion sheet in each interior space and adapted to retain a semiconductor wafer therein,

wherein a surface of the wafer mounting cushion sheet includes self-sucking portions and non-sucking portions, said self-sucking portions selectively exert a vacuum on the semiconductor wafer, a fixing force by which the wafer mounting cushion sheet retains the semiconductor wafer is adjusted by varying an area density of the self-sucking portions, and the area density of the self-sucking portions varies by location across the wafer mounting cushion sheet.

2. The wafer container with a wafer mounting sheet according to claim 1, wherein the area density of the self-sucking portions in an outer circumference part of the wafer mounting cushion sheet, which retain an outer circumference part of the semiconductor wafer, is smaller than that of the self-sucking portions in the central part of the wafer mounting cushion sheet, which retain a central part of the semiconductor wafer.

3. The wafer container with a wafer mounting sheet according to claim 2, wherein the area density of the self-sucking portions in the wafer mounting cushion sheet reduces from the central part of the wafer mounting cushion sheet toward the outer circumference part of the wafer mounting cushion sheet, which suck the outer circumference part of the semiconductor wafer.

4. The wafer container with a wafer mounting sheet according to claim 1, wherein at least a part of a region where the area density of the self-sucking portions is small is inside an outer edge of a transfer chuck that removes the semiconductor wafer from the wafer mounting cushion.

5. The wafer container with a wafer mounting sheet according to claim 1, wherein a surface of the non-sucking portions is substantially level with a surface of the self-sucking portions.

6. The wafer container with a wafer mounting sheet according to claim 1, wherein the non-sucking portions comprise a sheet with non-sucking characteristics layered on a surface of the self-sucking portions.

7. The wafer container with a wafer mounting sheet according to claim 1, wherein the non-sucking portions comprise a part of a surface of the self-sucking portions that is converted to have non-sucking characteristics.

8. The wafer container with a wafer mounting sheet according to claim 1, wherein the non-sucking portions comprise a concavo-convex part of a surface of the self-sucking portions.